Mechanical investigations of free-standing SiN membranes patterned with one-dimensional photonic crystal structures

Autor: Ali Akbar Darki, Robin Vinther Nielsen, Jens Vinge Nygaard, Aurélien Dantan

Publikováno v: Darki, A A, Nielsen, R V, Nygaard, J V & Dantan, A R 2022, ' Mechanical investigations of free-standing SiN membranes patterned with one-dimensional photonic crystal structures ', Journal of Applied Physics, vol. 131, no. 19, 195101 . https://doi.org/10.1063/5.0093016

A detailed investigation of the structural and vibrational properties of various prestressed silicon nitride membranes patterned with one-dimensional photonic crystal structures is presented. The tensile stress-related deformation of the structure in

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