Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Robin Lehmkau"'
Autor:
Robin Lehmkau, Doris Mutschall, Alena Kaiser, Martin Ebermann, Nobert Neumann, Malte Czernohorsky, Markus Neuber, Karla Hiller, Jan Seiler, Toni D. Großmann, Alexey Shaporin, Jens Lienig
Publikováno v:
Optical Engineering. 61
Fully CMOS-compatible pyroelectric infrared detector based on doped HfO2 thin film in 3D-integration
Autor:
Robin Lehmkau, Doris Mutschall, Alena Kaiser, Martin Ebermann, Norbert Neumann, Malte Czernohorsky, Markus Neuber, Karla Hiller, Jan Seiler, Toni Großmann
Publikováno v:
Oxide-based Materials and Devices XIII.
Autor:
Robin Lehmkau
Publikováno v:
SMSI 2021 Proceedings.
The combined evaluation of the thermal and electrical domain of a pyroelectric system is a challenging task. The proposed approach precisely models the thermal system with FEM. The output data is approximated with a fit function and transferred to SP