Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Robert Schmaler"'
Publikováno v:
WSC
Automated material handling systems (AMHS) in semiconductor fabrication plants (Fabs) are crucial to achieving a high production throughput. When upgrading an existing or planning a new Fab, production plans are used to decide on the required toolset
Publikováno v:
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Automated material handling systems (AMHS) in Semiconductor Fabrication Plants (Fabs) are crucial to achieve a high production throughput. When refurbishing an existing or planning a new Fab production plans are used to decide on the necessary tool p
Autor:
Ralf Hupfer, Matthias Schoeps, Robert Schmaler, Thorsten Schmidt, Joerg Luebke, Christian Hammel
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 30:440-447
Due to reasons like higher flexibility demands, smaller lot sizes in production, and tool upgrades leading to higher throughputs, existing automated material handling systems are facing ever rising requirements. At the same time, the potential to upg
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Integration of transport system information into Manufacturing Execution System (MES) dispatching rules is not yet standard practice. Yet, it could be helpful in several areas of a semiconductor fabrication plant. For example, to react to system fail
Autor:
Matthias Schops, Ulrich Horn, Robert Schmaler, Thorsten Schmidt, Christian Hammel, Jorg Lubke, Marcin Mosinski
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Due to higher flexibility demands, smaller lot sizes in production, and tool upgrades leading to higher throughputs existing, Automated Material Handling Systems are facing rising requirements. At the same time, the potential to upgrade transport sys
Publikováno v:
Logistics Journal Proceedings.
Logistics Journal: Proceedings, Vol. 07, Iss. 1 - Materialflussrechner in komplexen Materialflusssystemen generieren eine grose Anzahl an Daten zu systeminternen Ereignissen. Deren Informationspotential wird derzeit aufgrund des enormen Datenumfangs