Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Robert Schmaler"'
Publikováno v:
WSC
Automated material handling systems (AMHS) in semiconductor fabrication plants (Fabs) are crucial to achieving a high production throughput. When upgrading an existing or planning a new Fab, production plans are used to decide on the required toolset
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a3ef32cb3acee457449b95feda93b5b6
https://doi.org/10.1109/wsc48552.2020.9383907
https://doi.org/10.1109/wsc48552.2020.9383907
Publikováno v:
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Automated material handling systems (AMHS) in Semiconductor Fabrication Plants (Fabs) are crucial to achieve a high production throughput. When refurbishing an existing or planning a new Fab production plans are used to decide on the necessary tool p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0ade37b19583df2512e7d03de6f6e490
https://doi.org/10.1109/asmc49169.2020.9185350
https://doi.org/10.1109/asmc49169.2020.9185350
Autor:
Ralf Hupfer, Matthias Schoeps, Robert Schmaler, Thorsten Schmidt, Joerg Luebke, Christian Hammel
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 30:440-447
Due to reasons like higher flexibility demands, smaller lot sizes in production, and tool upgrades leading to higher throughputs, existing automated material handling systems are facing ever rising requirements. At the same time, the potential to upg
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f2d4d4c493f1a27ab85e54f2b9c27061
https://doi.org/10.1109/tsm.2017.2756104
https://doi.org/10.1109/tsm.2017.2756104
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Integration of transport system information into Manufacturing Execution System (MES) dispatching rules is not yet standard practice. Yet, it could be helpful in several areas of a semiconductor fabrication plant. For example, to react to system fail
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::884e6b4424ca67c92f83cabe7da022b5
https://doi.org/10.1109/asmc.2016.7491110
https://doi.org/10.1109/asmc.2016.7491110
Autor:
Matthias Schops, Ulrich Horn, Robert Schmaler, Thorsten Schmidt, Christian Hammel, Jorg Lubke, Marcin Mosinski
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Due to higher flexibility demands, smaller lot sizes in production, and tool upgrades leading to higher throughputs existing, Automated Material Handling Systems are facing rising requirements. At the same time, the potential to upgrade transport sys
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::db7a78830105fdb6dbca356c77534432
https://doi.org/10.1109/asmc.2016.7491109
https://doi.org/10.1109/asmc.2016.7491109
Publikováno v:
Logistics Journal Proceedings.
Logistics Journal: Proceedings, Vol. 07, Iss. 1 - Materialflussrechner in komplexen Materialflusssystemen generieren eine grose Anzahl an Daten zu systeminternen Ereignissen. Deren Informationspotential wird derzeit aufgrund des enormen Datenumfangs
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f6aade16762c5e0003e47b91e3b5f7bb
https://doi.org/10.2195/lj_proc_wustmann_de_201108_01
https://doi.org/10.2195/lj_proc_wustmann_de_201108_01
Autor:
Schmaler, Robert, Hammel, Christian, Schmidt, Thorsten, Schoeps, Matthias, Luebke, Joerg, Hupfer, Ralf
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing; Nov2017, Vol. 30 Issue 4, p440-447, 8p
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC); 2016, p94-99, 6p
Autor:
Hammel, Christian, Schmaler, Robert, Schmidt, Thorsten, Lubke, Jorg, Schops, Matthias, Horn, Ulrich, Mosinski, Marcin
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC); 2016, p87-93, 7p