Zobrazeno 1 - 10
of 28
pro vyhledávání: '"Robert Primig"'
Autor:
Dana Pitzer, Wolfram Wersing, Mathias Link, M. Schreiter, Robert Primig, M.B. Assouar, Reinhard Gabl, Jan Weber, Omar Elmazria
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 24:218-222
This article reports on the growth and characterization of polycrystalline ZnO films having c axis inclined up to 16° with respect to the substrate normal. These films allow the excitation of shear and longitudinal waves with comparable electromecha
Publikováno v:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 53:492-496
Solidly mounted film bulk acoustic resonators (FBAR) operating at 850 MHz in the shear vibration mode have been fabricated. C-axis inclined zinc oxide (ZnO) thin films realized by modified reactive magnetron sputtering were used. Coupling factors k/s
Autor:
Dana Pitzer, Gerald Dr. Eckstein, Heinz Zeininger, Matthias Schreiter, Wolfram Wersing, Robert Primig, Hans-Dieter Feucht, Reinhard Gabl
Publikováno v:
Biosensors and Bioelectronics. 19:615-620
A novel integrated bio-sensor technology based on thin-film bulk acoustic wave resonators on silicon is presented and the feasibility of detecting DNA and protein molecules proofed. The detection principle of these sensors is lable-free and relies on
Publikováno v:
Journal of the European Ceramic Society. 24:1589-1592
Thin film bulk acoustic resonators (FBARs) based on Pb(Zr x Ti (1− x ) )O 3 (PZT) with varying compositions, ranging from x =0.25 to 0.6, were fabricated to investigate hysteresis-like dependencies of the resonance frequency and electro-mechanical
Autor:
R. Bruchhaus, Gerald Gerlach, Robert Primig, Matthias Schreiter, B. Winkler, R. Koehler, Dana Pitzer, Guenter Hofmann, Wolfram Wersing, N. Heß
Publikováno v:
Integrated Ferroelectrics. 44:77-90
Lately, pyroelectric thin film detectors gain in significance in the field of presence detection. In the paper, different variants of Pb(ZrTi)O 3 based detector arrays with 8 to 256 pixels are introduced. The sensing elements are arranged on thin mic
Autor:
Konrad Samwer, Cay Uwe Pinnow, Igor Kasko, Nicolas Nagel, Franz Jahnel, Ulrich Geyer, Robert Primig, Christine Dehm, Michael Seibt
Publikováno v:
Integrated Ferroelectrics. 37:29-38
High quality IrO2 films are of great interest as electrodes and oxygen barrier layers for PZT and SBT based integrated non-volatile ferroelectric memories. The investigated IrO2 films were reactively DC-sputtered in an Ar/O2 atmosphere. Generic curve
Publikováno v:
Integrated Ferroelectrics. 25:1-11
A planar, multi-target sputtering approach was used to deposit tetragonal Pb(Zr, Ti)O3(PZT) films with Zr/(Zr+Ti) = 0.25−0.3 on Pt bottom electrodes for the use in thin film pyroelectric IR detector arrays. Low stress ferroelectric capacitor stacks
Publikováno v:
Integrated Ferroelectrics. 21:461-467
A planar multi target sputtering approach was used to deposit Pb(Zr, Ti)O3 (PZT) films with different composition on Pt bottom electrodes for the use in thin film pyroelectric IR detector arrays. Low stress ferroelectric capacitor stacks are needed i
Autor:
J. Vollheim, Wolfram Wersing, R. Köhler, N. Hess, Matthias Schreiter, N. Neumann, R. Bruchhaus, M. Simon, Robert Primig, Dana Pitzer
Publikováno v:
Integrated Ferroelectrics. 17:369-376
A planar multi target sputtering approach was used to deposit PbTiO3 (PT) and Pb(Zr, Ti)O3 (PZT) films on TiO2/Pt bottom electrodes for the use in thin film pyroelectric IR detector arrays. PZT films with a Zr content of 28 at% (PZ28T) exhibited the
Publikováno v:
Integrated Ferroelectrics. 14:141-149
A planar multi target sputtering approach was used to deposit self polarized PZT films on TiO2/Pt bottom electrodes for the use in thin film pyroelectric IR detector arrays. By using elevated substrate temperatures of about 450°C “in situ” growt