Zobrazeno 1 - 10
of 57
pro vyhledávání: '"Robert Mroczyński"'
Autor:
Robert Mroczyński, Grzegorz Głuszko, Romuald B. Beck, Andrzej Jakubowski, Michał Ćwil, Piotr Konarski, Patrick Hoffmann, Dieter Schmeißer
Publikováno v:
Journal of Telecommunications and Information Technology, Iss 3 (2023)
This work reports on changes in the properties of ultra-thin PECVD silicon oxynitride layers after high- temperature treatment. Possible changes in the structure, composition and electrophysical properties were investigated by means of spectroscopic
Externí odkaz:
https://doaj.org/article/003c8061cc35468d90e4d4ebe16d36db
Autor:
Robert Mroczyński, Tomasz Bieniek, Romuald B. Beck, Michał Ćwil, Piotr Konarski, Patrick Hoffmann, Dieter Schmeißer
Publikováno v:
Journal of Telecommunications and Information Technology, Iss 3 (2023)
In this paper differences in chemical composition of ultra-thin silicon oxynitride layers fabricated in planar rf plasma reactor are studied. The ultra-thin dielectric layers were obtained in the same reactor by two different methods: ultrashallow ni
Externí odkaz:
https://doaj.org/article/04cd6989cd194b1286d03ae5337d02fd
Autor:
Mirosław Puźniak, Wojciech Gajewski, Aleksandra Seweryn, Marcin T. Klepka, Bartłomiej S. Witkowski, Marek Godlewski, Robert Mroczyński
Publikováno v:
Materials, Vol 16, Iss 6, p 2539 (2023)
This work demonstrated the optimization of HiPIMS reactive magnetron sputtering of hafnium oxynitride (HfOxNy) thin films. During the optimization procedure, employing Taguchi orthogonal tables, the parameters of examined dielectric films were explor
Externí odkaz:
https://doaj.org/article/ad98c15c52d64218958d4916e6c89fa2
Autor:
Dario Schiavon, Robert Mroczyński, Anna Kafar, Grzegorz Kamler, Iryna Levchenko, Stephen Najda, Piotr Perlin
Publikováno v:
Materials, Vol 14, Iss 23, p 7364 (2021)
Gallium nitride (GaN) doped with germanium at a level of 1020 cm−3 is proposed as a viable material for cladding layers in blue- and green-emitting laser diodes. Spectral reflectometry and ellipsometry are used to provide evidence of a reduced inde
Externí odkaz:
https://doaj.org/article/0a17a2709b894f66a56dd29a5bafd161
Publikováno v:
Nanomaterials, Vol 10, Iss 12, p 2387 (2020)
Colloidal cubic silicon-carbide nanocrystals have been fabricated, characterized, and introduced into metal–insulator–semiconductor and metal–insulator–metal structures based on hafnium oxide layers. The fabricated structures were characteriz
Externí odkaz:
https://doaj.org/article/57ffbcfcf46c45cca72c64e2ea7f514d
Autor:
Robert Mroczyński, Daniel Iwanicki, Bartosz Fetliński, Monika Ożga, Michał Świniarski, Arkadiusz Gertych, Mariusz Zdrojek, Marek Godlewski
Publikováno v:
Crystals, Vol 10, Iss 5, p 384 (2020)
The future applications of hyperbolic metamaterials demand stacks of materials with alternative ultra-thin conductive/dielectric films with good homogeneity of the thickness and reduced roughness level. In this work, the technology of pulsed-DC magne
Externí odkaz:
https://doaj.org/article/f3b5d86b1b024f35b032143c03fea7e9
Publikováno v:
Materials, Vol 7, Iss 2, Pp 1249-1260 (2014)
In this paper we investigate influence of radio frequency plasma enhanced chemical vapor deposition (RF PECVD) process parameters, which include gas flows, pressure and temperature, as well as a way of sample placement in the reactor, on optical prop
Externí odkaz:
https://doaj.org/article/d4a82344ccc34521b5e2e363516747c4
Autor:
Piotr Perlin, Robert Mroczyński, Grzegorz Kamler, Iryna Levchenko, Dario Schiavon, Stephen P. Najda, Anna Kafar
Publikováno v:
Materials; Volume 14; Issue 23; Pages: 7364
Materials, Vol 14, Iss 7364, p 7364 (2021)
Materials
Materials, Vol 14, Iss 7364, p 7364 (2021)
Materials
Gallium nitride (GaN) doped with germanium at a level of 1020 cm−3 is proposed as a viable material for cladding layers in blue- and green-emitting laser diodes. Spectral reflectometry and ellipsometry are used to provide evidence of a reduced inde
Autor:
Krystyna Lawniczak-Jablonska, Robert Mroczyński, Sylwia Gieraltowska, Aleksandra Seweryn, Piotr Kuzmiuk, Marek Godlewski
Publikováno v:
Materials
Volume 14
Issue 18
Materials, Vol 14, Iss 5395, p 5395 (2021)
Volume 14
Issue 18
Materials, Vol 14, Iss 5395, p 5395 (2021)
The continuous development of ALD thin films demands ongoing improvements and changes toward fabricating materials with tailored properties that are suitable for different practical applications. Ozone has been recently established as a precursor, wi
Autor:
Robert Mroczyński
Publikováno v:
2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS).
Colloidal cubic SiC-NCs have been introduced into MIM structures with HfO x layers. The examined electrical performance of NCs-MIM structures has demonstrated improved switching characteristics, good retention, and a high HRS/LRS ratio compared to re