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Autor:
Rafal Chodun, Robert Mirowski, B. Wicher, Krzysztof Zdunek, Grzegorz W. Strzelecki, Sebastian Okrasa, Lukasz Skowronski, Magdalena Wilczopolska, Katarzyna Nowakowska – Langier
Publikováno v:
National Information Processing Institute
This paper describes one of the series of works that aimed to investigate the impact of modulation frequency. This parameter is specific to plasma excitation and is associated with the properties of the thin films of copper nitride synthesized by mag
Externí odkaz:
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https://api.elsevier.com/content/article/PII:S0040609019307576?httpAccept=text/xml
https://api.elsevier.com/content/article/PII:S0040609019307576?httpAccept=text/xml
