Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Robert J. Chong"'
Publikováno v:
IFAC Proceedings Volumes. 39:1127-1132
An iterative method is developed to determine a performance criterion for best achievable performance for discrete integral controllers. Using the performance criterion, optimal performance of the controller in place is also indicated. An analytical
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::80cc0f4983618702d21a7ea6b7e29d32
https://doi.org/10.3182/20060402-4-br-2902.01127
https://doi.org/10.3182/20060402-4-br-2902.01127
Autor:
Jason P. Cain, Bruno M. LaFontaine, Oleg Kritsun, Amogh Prabhu, Kevin R. Lensing, Alok Vaid, Robert J. Chong, Richard Good
Publikováno v:
SPIE Proceedings.
In this paper, results and analysis are presented from Advanced Micro Devices' (AMD) efforts at calculating lithography dose and focus parameters using scatterometry metrology and semi-physical CD models. The system takes advantage of the accurate an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e1abf9a980d37f02f107fcaf6366fbc6
https://doi.org/10.1117/12.711548
https://doi.org/10.1117/12.711548