Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Robert I. Scace"'
Publikováno v:
Journal of The Electrochemical Society. 143:258-263
The methodology and experiment for certification of reference specimens for determining interstitial oxygen concentration in semiconductor silicon are reported. These reference specimens are intended for calibration of infrared spectrophotometers whi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9bc5dcf30c4dc60dbbaeec978ed444de
https://doi.org/10.1149/1.1836418
https://doi.org/10.1149/1.1836418
Publikováno v:
SPIE Proceedings.
The accurate measurement of surface finish requires standard specimens to calibrate and check the operation of the measuring instruments. This is true both for profiling techniques such as the stylus and area averaging techniques such as light scatte
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::419745f105e34985189b2fcac5504522
https://doi.org/10.1117/12.132112
https://doi.org/10.1117/12.132112
Autor:
Robert I. Scace
Publikováno v:
AIP Conference Proceedings.
Specialized equipment for manufacturing advanced optoelectronic devices is briefly discussed, with emphasis on the state of its development in Japan. Illustrative examples of development of other Japanese equipment for silicon microcircuit manufactur
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0b080debb21cc0c1b88873d971d710a6
https://doi.org/10.1063/1.35539
https://doi.org/10.1063/1.35539
Autor:
Robert I. Scace
Publikováno v:
Solar Cells. 7:77-78
The specification for solar cell silicon slices under development by the Semiconductor Equipment and Materials Institute is described. The specification covers physical and dimensional but not electrical attributes of the material. Work to establish
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0568f439cba2056e6b3588409a39546f
https://doi.org/10.1016/0379-6787(82)90091-6
https://doi.org/10.1016/0379-6787(82)90091-6