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The reliability of MEMS-based sensors for automotive applications critically depends on their high-cycle load-bearing capacity. To investigate the influence of high-frequency cyclic loading on mechanical properties of polycrystalline silicon, a stati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ce24b278b5e9a0cab02f276ba04dbf64
https://publica.fraunhofer.de/handle/publica/216608
https://publica.fraunhofer.de/handle/publica/216608
