Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Robert De Angelis"'
Publikováno v:
Materials Science Forum. :553-558
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0b5ec9b4fc365474c904c6653809cc8b
https://doi.org/10.4028/www.scientific.net/msf.408-412.553
https://doi.org/10.4028/www.scientific.net/msf.408-412.553
Autor:
Michael Robert De Angelis
Publikováno v:
Journal of Educational Change. 8:287-289
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6c57b9740acfee6bd1ce35bec4cf73d5
https://doi.org/10.1007/s10833-007-9036-8
https://doi.org/10.1007/s10833-007-9036-8
Publikováno v:
Advances in X-ray Analysis. 38:235-242
X-ray diffraction techniques were utilized to study the film stress effects in silicon wafers subjected to several processing conditions. The wafer processing matrix consisted of three thicknesses of polysilicon deposited on (100) silicon with a 25 n
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a80900306f1f85ed7f94cc4599147616
https://doi.org/10.1154/s0376030800017845
https://doi.org/10.1154/s0376030800017845
Publikováno v:
Advances in X-Ray Analysis ISBN: 9780306450457
X-ray diffraction techniques were utilized to study the film stress effects in silicon wafers subjected to several processing conditions. The wafer processing matrix consisted of three thicknesses of polysilicon deposited on (100) silicon with a 25 n
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ece1f8cd0fb9ff82be7d0dd3e4195085
https://doi.org/10.1007/978-1-4615-1797-9_26
https://doi.org/10.1007/978-1-4615-1797-9_26
