Zobrazeno 1 - 10
of 34
pro vyhledávání: '"Robert Barlovic"'
Autor:
Marcel Stehli, Robert Barlovic
Publikováno v:
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
The verification of a new or changed recipe is a common process control task in a semiconductor factory. It is also a prime example of the demanding integration challenges that Advanced Process Control (APC) is facing today. State-of-the-art process
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9882bccdf539b2e32beb2b412ef055ee
https://doi.org/10.1109/asmc51741.2021.9435737
https://doi.org/10.1109/asmc51741.2021.9435737
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 20:393-399
In microprocessor manufacturing it is very important to monitor the processed material on certain metrology steps. This is done in order to characterize the manufacturing process by verifying correct processing and ensuring availability of adequate i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ba776fe5b3ee72ac0a69aa91d0d2ef0f
https://doi.org/10.1109/tsm.2007.907613
https://doi.org/10.1109/tsm.2007.907613
Publikováno v:
Physica A: Statistical Mechanics and its Applications. 294:249-256
A microscopic description of packet transport in the Internet by using a simple cellular automaton model is presented. A generalised exclusion process is introduced which allows to study travel times of the particles ('data packets') along a fixed pa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::71c8b108daa65e2a755439dda8f43875
https://doi.org/10.1016/s0378-4371(01)00107-8
https://doi.org/10.1016/s0378-4371(01)00107-8
Publikováno v:
Physica A: Statistical Mechanics and its Applications. 294:525-538
The jamming behavior of a single lane traffic model based on a cellular automaton approach is studied. Our investigations concentrate on the so-called VDR model which is a simple generalization of the well-known Nagel-Schreckenberg model. In the VDR
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::aee648ccee5a43b2e132b071fa061d5c
https://doi.org/10.1016/s0378-4371(01)00111-x
https://doi.org/10.1016/s0378-4371(01)00111-x
Autor:
Hermann Weindl, Stephan Melzig, Robert Barlovic, Andreas Becker, Heiko Wagner, Thomas Kowtsch, Sebastian Knappe, Dirk Grossmann, Wolfgang Jackel, Mark Reiche, Raymond Goss, Daniel Zschabitz, Jan Rothe, Uwe Schulze
Publikováno v:
2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
In recent years, randomization of process order as well as randomization of the wafer map in the cassettes delivering the wafers was increasingly used to be able to correlate yield variations with specific segments of the process flow (see [1] and [2
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::55738ae8d4b5cc3181ac502b58c5263c
https://doi.org/10.1109/asmc.2010.5551456
https://doi.org/10.1109/asmc.2010.5551456
Publikováno v:
Wiley StatsRef: Statistics Reference
The task of sampling in state-of-the-art semiconductor manufacturing is to provide relevant metrology data for a representative part of the population in order to monitor and maintain the process, thereby minimizing the risk of processing errors/faul
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::aa38aa95d57ccf0dfa4c42171736a5ba
https://doi.org/10.1002/9780470061572.eqr152
https://doi.org/10.1002/9780470061572.eqr152
Publikováno v:
Scopus-Elsevier
Traffic and Granular Flow ’03 ISBN: 9783540258148
Traffic and Granular Flow ’03 ISBN: 9783540258148
A recently introduced cellular automaton model for Internet traffic is investigated in the context of boundary induced phase transitions and the appropriate phase diagrams. Since the model allows multi allocation of sites there are some deviations in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0b90f965c8cef1e744f2f6c0ff0b7ac5
Publikováno v:
Traffic and Granular Flow ’03 ISBN: 9783540258148
A traffic model based on a cellular automaton (CA) approach with the focus on limited braking capabilities is presented. It is shown that the known empirical features of traffic flow can be reproduced including even the so called pinch effect being t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b71648665e9e0626a6a7a1628ae41a42
Publikováno v:
Traffic and Granular Flow’01 ISBN: 9783642073045
A microscopic description of packet transport in the Internet by using a simple cellular automaton model is presented. Therefore we introduced a generalized exclusion process which allows to study travel times of the particles (‘data packets’) al
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6e6e939c06f0ff4bf6b7d32d47600cf2
Publikováno v:
Traffic and Granular Flow’01 ISBN: 9783642073045
The impact of global traffic light control strategies for city networks is analyzed in a recently proposed cellular automaton model. The model combines basic ideas of the Biham-Middleton-Levine model for city traffic and the Nagel-Schreckenberg model
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::46763756d7885a061ee2edf3805321bc