Zobrazeno 1 - 10
of 11
pro vyhledávání: '"Rikiya Taniguchi"'
Autor:
Masato Saito, Ryu Komatsu, Kazuki Hagihara, Takeharu Motokawa, Syuichi Taniguchi, Rikiya Taniguchi, Akihiko Ando, Shingo Kanamitsu, Ryoji Yoshikawa, Hideaki Sakurai, Masato Naka, Ryota Seki, Eiji Yamanaka, Machiko Suenaga, Noriko Iida nee Sakurai
Publikováno v:
Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology.
Nanoimprint lithography (NIL) is promising technology for next generation lithography for the fabrication of semiconductor devices. The advantages of NIL are simpler process, less design rule restriction, which lead to lower cost-of-ownership, compar
Autor:
Kiyoshi Ogata, Rikiya Taniguchi, Takashi Hirano, Kazuhiko Omote, Kazuki Hagihara, Naoya Hayashi, Eiji Yamanaka, Yoshiyasu Ito
Publikováno v:
Photomask Technology 2018.
Nanoimprint lithography (NIL) is one of the highest potential candidates for next generation lithography (NGL) in semiconductors[1][2]. NIL is very useful technology for pattern fabrication in high resolutions and low costs compared to conventional o
Autor:
Yoshiyasu Ito, Kazuki Hagihara, Naoya Hayashi, Kiyoshi Ogata, Kazuhiko Omote, Rikiya Taniguchi, Eiji Yamanaka
Publikováno v:
SPIE Proceedings.
Nanoimprint lithography (NIL) is one of the highest potential candidates for next generation lithography in semiconductors. NIL is very useful technology for pattern fabrication in high resolution compared to conventional optical lithography. NIL tec
Autor:
Kazuhiko Omote, Eiji Yamanaka, Masamitsu Itoh, Naoya Hayashi, Kiyoshi Ogata, Rikiya Taniguchi, Yoshiyasu Ito
Publikováno v:
SPIE Proceedings.
Nanoimprint lithography (NIL) is one of the most potential candidates for the next generation lithography for semiconductor. It will achieve the lithography with high resolution and low cost. High resolution of NIL will be determined by a high defini
Publikováno v:
Journal of Peptide Science. 18:177-182
Peptide uptake by plant roots from degraded soybean-meal products was analyzed in Brassica rapa and Solanum lycopersicum. B. rapa absorbed about 40% of the initial water volume, whereas peptide concentration was decreased by 75% after 24 h. Analysis
Publikováno v:
Journal of peptide science : an official publication of the European Peptide Society. 18(3)
Peptide uptake by plant roots from degraded soybean-meal products was analyzed in Brassica rapa and Solanum lycopersicum. B. rapa absorbed about 40% of the initial water volume, whereas peptide concentration was decreased by 75% after 24 h. Analysis
Publikováno v:
SPIE Proceedings.
An immersion microscope with high NA condenser lens is evaluated. The effects of high NA condenser lens are studied with simulation and experiment. The one effect is CD linearity improvement. We have already reported that our calibration method impro
Publikováno v:
SPIE Proceedings.
A new calibration method for critical dimension (CD) linearity improvement with an immersion microscope is proposed. Correlation tables of an edge position against CD of the clear pattern and CD of the dark pattern are obtained experimentally. The de
Autor:
Masamitsu Itoh, Mari Sakai, Hidehiro Watanabe, Kyoh Ohtsubo, Rikiya Taniguchi, Takehiro Kondoh
Publikováno v:
SPIE Proceedings.
This report shows characteristics of the chemical amplified positive-tone resist (CAR) we have developed for 50keV electron beam (E-beam) mask writing system. The CAR includes newly developed polymer. Including the polymer, CD change is negligible sm
Autor:
Takayuki Iwamatsu, Iwao Higashikawa, Suigen Kyoh, Hidehiro Watanabe, Rikiya Taniguchi, Takashi Tuchiya, Hideaki Sakurai
Publikováno v:
SPIE Proceedings.
A set of deep UV attenuated phase shift masks (PSMs) was fabricated to clarify the correlation between PSM optical characters and the printing performance. A SiNx single-layer film was adopted as a phase shifter which works as an attenuator simultane