Zobrazeno 1 - 1
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pro vyhledávání: '"Rijin Zhong"'
Publikováno v:
Machines, Vol 11, Iss 12, p 1044 (2023)
A macro–micro dual-drive motion platform is a class of key system utilized in ultra-precision instruments and equipment for realizing ultra-high-precision positioning, which relates to the fields of semiconductor manufacturing, ultra-precision test
Externí odkaz:
https://doaj.org/article/c49d844f9e904eb4a5c7a59376ccfd01
