Zobrazeno 1 - 6 of 6 pro vyhledávání: '"Riel, M.C.J.M. van"'
1
Improved sub-surface AFM using photothermal excitation
Autor: Reijzen, M.E. van, Tamer, M.S., Es, M.H. van, Riel, M.C.J.M. van, Keyvani Janbahan, A., Sadeghian Marnani, S., Lans, M.J. van der
Publikováno v: Proceedings Metrology, Inspection, and Process Control for Microlithography XXXII, 2018, San Jose, CA, USA
In this paper, we present an AFM based subsurface measurement technique that can be used for overlay and critical dimensions (CD) measurements through optically opaque layers. The proposed method uses the surface elasticity map to resolve the presenc
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http://resolver.tudelft.nl/uuid:b3312949-6ae3-467a-952e-b209dce3360f
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2
Electrostatically actuated probes for Scanning Subsurface Ultrasonic Resonance Frequency Microscopy
Autor: Es, M.H. van, Riel, M.C.J.M. van, Duivenvoorde, T., Sadeghian Marnani, H.
Publikováno v: SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Scanning Subsurface Ultrasonic Force Microscopy (SSURFM) relies on high frequency ultrasound in combination with Atomic Force Microscopy to detect viscoelastic properties of buried materials with high spatial resolution. The key ingredient is a very
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3
Sub-surface Imaging with Photo Thermal Actuation
Autor: Reijzen, M.E. van, Tamer, M.S., Es, M.H. van, Riel, M.C.J.M. van, Duivenvoorde, T., Keyvani Janbahan, A., Sadeghian Marnani, S., Lans, M.J van der
In the semiconductor industry, the need for characterization of subsurface features of wafers on a sub-nanometer level becomes ever more important. With Scanning Subsurface Probe Microscopy (SSPM), the smallest features can be measured with high reso
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http://resolver.tudelft.nl/uuid:fdb3a562-9074-4855-9542-e96198dd808e
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5
Optical satellite communication space terminal technology at TNO
Autor: Saathof, R., Crowcombe, W.E., Kuiper, S., Valk, N.C.J. van der, Pettazzi, F., Lange, T.J. de, Kerkhof, P.J., Riel, M.C.J.M. van, Man, H. de, Truyens, D.C., Ferrario, I.
Publikováno v: Sodnik, Z.Karafolas, N.Cugny, B., Proceedings International Conference on Space Optics, ICSO 2018, 9-12 October 2018, Chania, Greece
Optical communications will complement radio frequency (RF) communications in the coming decades to enhance throughput, power efficiency and link security of satellite communication links. To enable optical communications technology for intersatellit
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::71ad265a6c379d25593edeb8c1cf083c
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6
Electromagnetic deformable mirror development at TNO
Autor: Kuiper, S., Doelman, N.J., Nieuwkoop, E., Overtoom, A.J., Russchenberg, T., Riel, M.C.J.M. van, Wildschut, J.A., Baeten, M.J.J., Human, J.D., Spruit, W.E.T., Brinkers, S., Maniscalco, M.P.
Publikováno v: Navarro, R.Burge, J.H., Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II. 26 June-1 July 2016, 9912
Over the last decade TNO has developed a deformable mirror concept using electromagnetic actuators with the main advantages of having very low non-linearity and hysteresis, low power consumption, and high inherent reliability of the actuators. TNO re
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::17492daebe6cb7491d51a5de2f9f3a67
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