Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Rick Levesque"'
Autor:
Raymond F. Smith, Ronnie Shepherd, Jaroslav Kuba, Alan J Wootton, Vyacheslav N. Shlyaptsev, Todd Ditmire, Gilliss Dyer, Rick Levesque, Saša Bajt, Richard A. London, Rex Booth, Mark A. McKernan, James Dunn, Richard M. Bionta, Michael D. Feit, Ernst E. Fill
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 507:475-478
Free electron lasers operating in the 0.1–1.5 nm wavelength range have been proposed for the Stanford Linear Accelerator Center (USA) and DESY (Germany). The unprecedented brightness and associated fluence (up to 30 J cm−2) predicted for pulses <
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::68dee4820c43f5f82332295fff945e38
https://doi.org/10.1016/s0168-9002(03)00899-4
https://doi.org/10.1016/s0168-9002(03)00899-4
Publikováno v:
NIP & Digital Fabrication Conference. 17:167-170
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c36e7b6b696dacf7d385190b1fcd37c9
https://doi.org/10.2352/issn.2169-4451.2001.17.1.art00035_1
https://doi.org/10.2352/issn.2169-4451.2001.17.1.art00035_1
Publikováno v:
NIP & Digital Fabrication Conference. 17:175-178
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::58b6a5d3f4de333c68a05200cfa7bd06
https://doi.org/10.2352/issn.2169-4451.2001.17.1.art00037_1
https://doi.org/10.2352/issn.2169-4451.2001.17.1.art00037_1
Autor:
Todd Ditmire, Jaroslav Kuba, Mark A. McKernan, Rick Levesque, Gilliss Dyer, James Dunn, Michael D. Feit, Raymond F. Smith, Ronnie Shepherd, Alan J Wootton, Richard A. London, Vyacheslav N. Shlyaptsev, Ronald H. Conant, Richard M. Bionta, Ernst E. Fill, Saša Bajt
Publikováno v:
AIP Conference Proceedings.
Free electron lasers operating in the 0.1 to 1.5 nm wavelength range have been proposed for the Stanford Linear Accelerator Center (USA) and DESY (Germany). The unprecedented brightness and associated fluence predicted for pulses
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d77cba1730a94fefecc2e66f194362b6
https://doi.org/10.1063/1.1521083
https://doi.org/10.1063/1.1521083
Autor:
Douglas Bugner, Richard Van Hanehem, Michelle Oakland, Peter Artz, Daniel Zaccour, Rick Levesque
Publikováno v:
Journal of Imaging Science and Technology. 49:317-ID
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9b92e9db3b65868d7c583a811ca7536d
https://doi.org/10.2352/j.imagingsci.technol.2005.49.3.art00013
https://doi.org/10.2352/j.imagingsci.technol.2005.49.3.art00013
Autor:
Mourad Idir, Rick Levesque, Seongtae Jeong, Pei-yang Yan, Patrick A. Kearney, Paul Denham, Michael S. Jones, Yun Lin, Jeffrey Bokor, Eric M. Gullikson, Lewis Johnson, James H. Underwood, Seno Rekawa, Phil Batson
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 16:3430
We report the design and operation of an at-wavelength system for extreme ultraviolet lithography mask blank defect detection. Initial results demonstrate sensitivity to submicron size phase defects. The performance of the system is compared with the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2dccd47c00f3fccf0fc73ac03dc9fb60
https://doi.org/10.1116/1.590473
https://doi.org/10.1116/1.590473
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