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Publikováno v:
2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA).
As the analysis of SRAM Memory Built In Self Test (MBIST), some failure modes such as single bit (SB) or dual bit (DB) failure can be localized accurately. The inspection area of SRAM SB/DB is around 1~2um2. Traditionally, we can use the Focus Ion Be