Zobrazeno 1 - 2
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pro vyhledávání: '"Richard P. Good"'
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 23:201-209
Principal component analysis (PCA) is a technique commonly used for fault detection and classification (FDC) in highly automated manufacturing. Because PCA model building and adaptation rely on eigenvalue decomposition of parameter covariance matrice
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::40db3f1539460a38265805952ccf22d7
https://doi.org/10.1109/tsm.2010.2041263
https://doi.org/10.1109/tsm.2010.2041263
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 23:168-177
The exponentially weighted moving average (EWMA) filter is commonly used for state estimation of run-to-run controllers in semiconductor manufacturing. It is widely known that, when at steady state, the EWMA filter provides the minimum mean square er
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ab3aad5241b9ae77befe02e12eb94608
https://doi.org/10.1109/tsm.2010.2041270
https://doi.org/10.1109/tsm.2010.2041270