Zobrazeno 1 - 10
of 16
pro vyhledávání: '"Richard Mlcak"'
Autor:
Kevin T. Turner, Laxminarayana Saggere, Richard Mlcak, David C. Roberts, J. Lodewyk Steyn, Martin A. Schmidt, Hanqing Li, Nesbitt W. Hagood, S. Mark Spearing
Publikováno v:
Sensors and Actuators A: Physical. :620-631
A piezoelectric actuator capable of high-frequency, high-stiffness actuation in microhydraulic systems was fabricated and experimentally characterized to frequencies in excess of 100 kHz. This high-frequency, high-stiffness actuation is enabled throu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::61ffd305cd2c8ebf3d277e5b90c06e94
https://doi.org/10.1016/s0924-4247(01)00841-x
https://doi.org/10.1016/s0924-4247(01)00841-x
Autor:
Richard Mlcak, Harry L. Tuller
Publikováno v:
Journal of Electroceramics. 4:415-425
Many of the most significant advances in achieving improved sensor performance have been tied to the integration of thin film oxides with micromachined and microelectronic technologies (MEMS). Arrays of microcantilever beams or microhotplates show gr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3bdd1a1c197dd34cde24e76e96cab7d4
https://doi.org/10.1023/a:1009916122253
https://doi.org/10.1023/a:1009916122253
Autor:
Richard Mlcak, Harry L. Tuller
Publikováno v:
Current Opinion in Solid State and Materials Science. 3:501-504
The most significant recent advances in achieving sensor sensitivity and selectivity has been tied to the integration of thin film sensors with micromachined and/or microelectronic technologies. Arrays of micro-hotplates, microcantilever beams and me
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4b1370194247ef48b3628307e4b83d8d
https://doi.org/10.1016/s1359-0286(98)80015-6
https://doi.org/10.1016/s1359-0286(98)80015-6
Autor:
Richard Mlcak, Harry L. Tuller
Publikováno v:
Sensors and Actuators B: Chemical. 35:255-261
Micromachining methods allow for the fabrication of small, three-dimensional structures including membranes, micro-valves, and pumps, channels, etc., in materials such as silicon. When integrated with microcircuitry this provides for the opportunity
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cb2711eae29c5cedac8cb7b112f83dff
https://doi.org/10.1016/s0925-4005(97)80064-0
https://doi.org/10.1016/s0925-4005(97)80064-0
Publikováno v:
Sensors and Actuators A: Physical. 40:49-55
We have demonstrated the ability to fabricate stress-free micromechanical cantilever beams by selective etching of silicon p—n structures in HF solutions utilizing a photoassisted electrochemical process. A particular novelty of this technique is t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c4283ebf6b2608ca471da652f6aac35c
https://doi.org/10.1016/0924-4247(94)85029-1
https://doi.org/10.1016/0924-4247(94)85029-1
Autor:
David Pelletier, D. Doppalapudi, Gerald Schultz, Harry L. Tuller, Scott Purchase, Patrick Gwynne, Paul Pyzowski, Martin Skelton, Jeffrey Bridgham, Richard Mlcak
Publikováno v:
2010 IEEE International Conference on Technologies for Homeland Security (HST).
A compact, rapid system for trace detection of explosives using MEMS-bases resonant structures is described. Various software algorithms are used to eliminate problems in previous implementations of array-based detectors. Results for detection of tra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5c83c8d0167c0f049665b70cfc186f8b
https://doi.org/10.1109/ths.2010.5655033
https://doi.org/10.1109/ths.2010.5655033
Autor:
Scott Purchase, Jeremie LeClair, Martin Skelton, Patrick Gwynne, Gerald Schultz, Richard Mlcak, Jeffrey Bridgham, D. Doppalapudi, Harry L. Tuller
Publikováno v:
MRS Proceedings. 1222
Microelectromechanical Systems (MEMS) are being extensively investigated as a means of miniaturizing piezoelectric sensors thereby offering higher sensitivity, reduced power consumption, and ability to form compact multi-sensor arrays. Such devices t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::31fa47ccdb5133090baa7f506c3bbf79
https://doi.org/10.1557/proc-1222-dd01-02
https://doi.org/10.1557/proc-1222-dd01-02
Autor:
Jeffrey Chan, D. Doppalapudi, Theodore D. Moustakas, Richard Mlcak, Harry L. Tuller, Anirban Bhattacharya
Publikováno v:
MRS Proceedings. 798
Miniaturized piezoelectric sensors based on Microelectromechanical Systems (MEMS) offer the advantages of reduced size, reduced power consumption, increased sensitivity coupled with the ability to form compact multi-sensor arrays. Fabrication of such
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::65302e4dedfdf3a2a774d640ebaeec19
https://doi.org/10.1557/proc-798-y10.61
https://doi.org/10.1557/proc-798-y10.61
Autor:
Laxman Saggere, J.L. Steyn, Martin A. Schmidt, Kevin T. Turner, Richard Mlcak, Kenneth S. Breuer, Hanqing Li, David C. Roberts, Y.-H. Su, S.M. Spearing, Onnik Yaglioglu, Jorge A. Carretero, Nesbitt W. Hagood
Publikováno v:
ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076).
Towards the development of novel class of miniature transducers with very high specific power, a high frequency and high flow rate hydraulic micro-pump with passive check valves was fabricated and tested. The micro-pump features a small piezoelectric
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4daaee0a29115bdec505a3bff586b28c
https://doi.org/10.1109/isaf.2000.941559
https://doi.org/10.1109/isaf.2000.941559
Autor:
Richard Mlcak, S.M. Spearing, J.L. Steyn, Onnik Yaglioglu, Nesbitt W. Hagood, Hanqing Li, Y.-H. Su, Martin A. Schmidt, Kevin T. Turner, David C. Roberts
Publikováno v:
2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e071c92699d82a7eb326548b5aa4de2b
https://doi.org/10.31438/trf.hh2002.13
https://doi.org/10.31438/trf.hh2002.13