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pro vyhledávání: '"Richard J. August"'
Publikováno v:
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).
Manufacturability and performance are key criteria for successful commercial MEMS products. The design of surface micro-machined z-axis capacitive transducers in particular offers challenges to achieving these criteria. These challenges include mecha
Publikováno v:
SPIE Proceedings.
Pressure sensors serve a variety of automotive applications, some which may experience high levels of acceleration such as tire pressure monitoring. To design pressure sensors for high acceleration environments it is important to understand their sen