Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Richard E. Strawser"'
Autor:
Victor M. Bright, Kevin D. Leedy, Cari F. Herrmann Abell, Richard E. Strawser, Steven R. Dooley, John L. Ebel, R. Cortez
Publikováno v:
Sensors and Actuators A: Physical. 134:600-605
The electrical and mechanical response of radio frequency (RF) microelectromechanical systems (MEMS) switches depends critically on the profile of the released structure. Stress gradients within the material can significantly alter the structural pro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::571b748b699dcc418362f18209404935
https://doi.org/10.1016/j.sna.2006.06.024
https://doi.org/10.1016/j.sna.2006.06.024
Autor:
Cari F. Herrmann, Jack L. Ebel, Victor M. Bright, Steven M. George, R. Cortez, Kevin D. Leedy, David C. Miller, Frank W. DelRio, Richard E. Strawser
Publikováno v:
Sensors and Actuators A: Physical. 135:262-272
Atomic layer deposition (ALD) was used to deposit an alternative dielectric barrier layer for use in radio frequency microelectromechanical systems (rf MEMS). The layer is an alloy mixture of Al2O3 and ZnO and is proposed for use as charge dissipativ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d872d6eec81180bf2d373ac236c6f616
https://doi.org/10.1016/j.sna.2006.07.002
https://doi.org/10.1016/j.sna.2006.07.002
Autor:
Faruque Ahamed, John L. Ebel, Rand R. Biggers, Guru Subramanyam, Mark Calcatera, Edward Nykiel, Richard E. Strawser, Robert Neidhard, Keith Stamper
Publikováno v:
Microwave and Optical Technology Letters. 47:370-374
This paper addresses experimental RF performance evaluation, and electrical parameter extraction of different size ferroelectric varactor shunt switches. The ferroelectric varactor shunt switch operation is based on nonlinear dielectric tunability of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3d137ff1d916cbe535526518d51596ba
https://doi.org/10.1002/mop.21172
https://doi.org/10.1002/mop.21172
Autor:
G. C. DeSalvo, Richard E. Strawser, Kevin D. Leedy, A. P. Walker, John L. Ebel, R. Cortez, R. M. Young
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 21:1172-1177
A series of surface micromachined microelectromechanical system switches with composite metal beams were fabricated by standard photolithographic techniques. The study was conducted in order to assess the influence of film stress and composition on t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3d6a94938b70958df734a0a97f0566fd
https://doi.org/10.1116/1.1560714
https://doi.org/10.1116/1.1560714
Publikováno v:
2006 IEEE MTT-S International Microwave Symposium Digest.
A latching capacitive RF MEMS switch has been successfully designed, fabricated and tested. The switch uses a long thin metal cantilever which is electrostatically held to an upper electrode at the free end and to a lower electrode at the beam root e
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::97251a6b233cc4c010f6eef69ce7c663
https://doi.org/10.1109/mwsym.2006.249482
https://doi.org/10.1109/mwsym.2006.249482
Autor:
Victor M. Bright, Kevin D. Leedy, Cari F. Herrmann, Steven M. George, John L. Ebel, R. Cortez, Frank W. DelRio, Richard E. Strawser, Nils Hoivik
Publikováno v:
2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535).
Atomic layer deposition (ALD) was used to create an Al/sub 2/O/sub 3//ZnO thin film for gold capacitive RF MEMS switches. These films exhibited a widely tunable range of physical properties, allowing the creation of a material capable of dissipating
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::85e3d4cc6f7559841cae0a5027f5dbca
https://doi.org/10.1109/mwsym.2004.1338985
https://doi.org/10.1109/mwsym.2004.1338985
Autor:
Richard E. Strawser
The development of microelectromechanical Systems (MEMS) switch technology and integration of this technology into radio frequency (RF) electronics has created numerous applications for both commercial and military systems. The incorporation of RF ME
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1984f808d0de11a103914d115edb8643
https://doi.org/10.21236/ada388290
https://doi.org/10.21236/ada388290
Autor:
H. T. Henderson, John L. Ebel, Richard E. Strawser, Kevin D. Leedy, R. Cortez, Matthew J. O'Keefe
Publikováno v:
MRS Proceedings. 594
The performance of microelectromechanical systems (MEMS) switches is highly dependent on the switches' constituent materials. The switch material must be able to provide both structural integrity and high electrical conductivity. Cantilever beams, do
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::be2ee3293a2c5d3cdfba36769291ba27
https://doi.org/10.1557/proc-594-213
https://doi.org/10.1557/proc-594-213
Publikováno v:
MRS Proceedings. 515
Flip chip interconnection of integrated circuits (IC) for packaging applications such as direct chip attachment use Pb-Sn solders as the connection between the die and the substrate. Underbump metallization is typically used to transition from the no
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6ea5fcd8f4771cc08388c1d32898081c
https://doi.org/10.1557/proc-515-85
https://doi.org/10.1557/proc-515-85
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