Parametric study of the electron temperature and density in dusty low-pressure RF plasmas with pulsed injection of hexamethyldisiloxane

Autor: Vincent Garofano, Bernard Despax, Richard Clergeraux, Kremena Makasheva, Luc Stafford

Publikováno v: 2016 IEEE International Conference on Plasma Science (ICOPS)
2016 IEEE International Conference on Plasma Science (ICOPS), Jun 2016, Banff, Canada. pp.1-1, ⟨10.1109/PLASMA.2016.7534044⟩

Optical emission spectroscopy (OES) is used to analyze the very-low-frequency cyclic evolution of the electron energy and density caused by repetitive formation and loss of dust nanoparticles in an argon RF asymmetric plasma reactor with pulsed injec

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9a425c7da62354fb4481e25603cebdf2
https://hal.archives-ouvertes.fr/hal-02324481