Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Rich Berger"'
Autor:
Ken Sotoodeh, Wei-Lun Jen, Jordan Owens, Brook Chao, Bruce Wilks, D. Hale McMichael, Frank L. Palmieri, Ronald Carpio, C. Grant Willson, Ed Labelle, Joseph Pham, Jeff Wetzel, Rich Berger
Publikováno v:
SPIE Proceedings.
Step and Flash Imprint Lithography (S-FIL ® ) in conjunction with Sacrificial Imprint Materials (SIM) shows promise as a cost effective solution to patterning sub 45 nm features and is capable of simultaneously patterning two levels of interconnect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b27739991c43a3105d21812c54d94479
https://doi.org/10.1117/12.772908
https://doi.org/10.1117/12.772908
Autor:
Rich Berger
Publikováno v:
Klinische Wochenschrift. 5:1326-1326
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e26e1185399b9d1c794b1ca432e22fe6
https://doi.org/10.1007/bf01717972
https://doi.org/10.1007/bf01717972