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Autor:
Christina L. Porter, Teis Coenen, Niels Geypen, Sandy Scholz, Loes van Rijswijk, Han-Kwang Nienhuys, Jeroen Ploegmakers, Johan Reinink, Hugo Cramer, Rik van Laarhoven, David O'Dwyer, Peter Smorenburg, Andrea Invernizzi, Ricarda Wohrwag, Hugo Jonquiere, Juliane Reinhardt, Omar El Gawhary, Simon G. J. Mathijssen, Peter D. Engblom, Heidi Chin, William T. Blanton, Sury Ganesan, Brian J. Krist, Florian Gstrein, Mark Phillips
Publikováno v:
Metrology, Inspection, and Process Control XXXVII.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b27f24e445e7420276b78ecc827d09a6
https://doi.org/10.1117/12.2658495
https://doi.org/10.1117/12.2658495
