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pro vyhledávání: '"Remy, J.A.R."'
Autor:
Remy, J.A.R.
The central topic of this thesis is dusty plasmas, in which particles are generated or injected. Such plasmas, when ignited in silane-based gas mixtures, are widely used in the semiconductor industry for depositing silicon layers (amorphous, micro-cr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=narcis______::e406355f7c1210ded8376cc7bf2a210c
https://research.tue.nl/nl/publications/515ef969-cbf2-4e42-b554-ac72f46c73ef
https://research.tue.nl/nl/publications/515ef969-cbf2-4e42-b554-ac72f46c73ef
Publikováno v:
High Temperature Material Processes, 9(1), 159-171. Begell House Inc.
Laser diagnostic studies of capacitively coupled rf discharges containing silane diluted in argon have received considerable attention in order to understand the dust particles' formation and behaviour. The formation mechanism of those macroscopic pa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=narcis______::b05e2db70acfb99650191d9933f407d6
https://research.tue.nl/nl/publications/2d9f2154-eaf8-4683-bffd-810442faa086
https://research.tue.nl/nl/publications/2d9f2154-eaf8-4683-bffd-810442faa086
Publikováno v:
Proceedings of the 27th International Conference on Phenomena in Ionised Gases (XXVII ICPIG 2005) 17-22 July 2005, Eindhoven, the Netherlands
Dust forming, capacitively-coupled RF plasmas, generated in helium-diluted silane at 13.56 MHz, are investigated using non-intrusive optical diagnostics. Measurements based on laser light scattering and spatio-temporal optical emission spectroscopy a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=narcis______::4a2daab48712d9a2e74a6b1b69c79a13
https://research.tue.nl/nl/publications/5035cfa5-6a11-4f70-8e6e-c00326b12efd
https://research.tue.nl/nl/publications/5035cfa5-6a11-4f70-8e6e-c00326b12efd
Publikováno v:
IEEE Transactions on Plasma Science, 32(2), 709-715. Institute of Electrical and Electronics Engineers
We know that cavity ring-down spectroscopy (CRDS) can be of particular relevance in the study of the optical absorption of dust particles in a radio-frequency silane plasma. Although CRDS has historically primarily made use of pulsed lasers as light
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=narcis______::26878d0179decf6f04b9bfedef401eb2
https://research.tue.nl/nl/publications/072ccde2-13cb-432e-adf6-8ece32df233e
https://research.tue.nl/nl/publications/072ccde2-13cb-432e-adf6-8ece32df233e