Zobrazeno 1 - 10
of 22
pro vyhledávání: '"Rekawa, Seno"'
Autor:
Anderson, Chris, Allezy, Arnaud, Weilun Chao, Cork, Carl, Cork, Will, Delano, Rene, DePonte, Jason, Dickinson, Michael, Gaines, Geoff, Gamsby, Jeff, Gullikson, Eric, Jones, Gideon, Meyers, Stephen, Miyakawa, Ryan, Naulleau, Patrick, Rekawa, Seno, Salmassi, Farhad, Vollmer, Brandon, Zehm, Daniel, Wenhua Zhu
Publikováno v:
Proceedings of SPIE; 1/20/2019, Vol. 10957, p1095708-1-1095708-8, 8p
Autor:
Miyakawa, Ryan, Anderson, Chris, Wenhua Zhu, Gaines, Geoff, Gamsby, Jeff, Cork, Carl, Jones, Gideon, Dickenson, Michael, Rekawa, Seno, Weilun Chao, Oh, Sharon, Naulleau, Patrick
Publikováno v:
Proceedings of SPIE; 1/20/2019, Vol. 10957, p109571X-1-109571X-7, 7p
Autor:
Felix, Nelson M., Lio, Anna, Anderson, Chris, Allezy, Arnaud, Chao, Weilun, Conley, Lucas, Cork, Carl, Cork, Will, Delano, Rene, DePonte, Jason, Dickinson, Michael, Gaines, Geoff, Gamsby, Jeff, Gullikson, Eric, Jones, Gideon, McQuade, Lauren, Miyakawa, Ryan, Naulleau, Patrick, Rekawa, Seno, Salmassi, Farhad, Vollmer, Brandon, Zehm, Daniel, Zhu, Wenhua
Publikováno v:
Proceedings of SPIE; March 2020, Vol. 11323 Issue: 1 p113230B-113230B-8, 1019079p
Autor:
Goldberg, Kenneth A., Miyakawa, Ryan, Anderson, Chris, Zhu, Wenhua, Gaines, Geoff, Gamsby, Jeff, Cork, Carl, Jones, Gideon, Dickenson, Michael, Rekawa, Seno, Chao, Weilun, Oh, Sharon, Naulleau, Patrick
Publikováno v:
Proceedings of SPIE; March 2019, Vol. 10957 Issue: 1 p109571X-109571X-7, 986147p
Autor:
Naulleau, Patrick, Anderson, Christopher, Baclea-an, Lorie Mae, Denham, Paul, George, Simi, Goldberg, Kenneth A., Hoef, Brian, Jones, Gideon, McClinton, Brittney, Miyakawa, Ryan, Montgomery, Warren, Rekawa, Seno, Wallow, Tom
Publikováno v:
Naulleau, Patrick; Anderson, Christopher; Baclea-an, Lorie Mae; Denham, Paul; George, Simi; Goldberg, Kenneth A.; et al.(2010). The SEMATECH Berkeley MET: Bridging the gap to 16-nm half pitch development. Lawrence Berkeley National Laboratory: Lawrence Berkeley National Laboratory. Retrieved from: http://www.escholarship.org/uc/item/2sq373rp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od_______325::346414ba821f788672eda3bc46c46aa4
http://www.escholarship.org/uc/item/2sq373rp
http://www.escholarship.org/uc/item/2sq373rp
Autor:
Naulleau, Patrick, Goldberg, Kenneth A., Anderson, Erik H., Batson, Phillip, Denham, Paul, Jackson, Keith, Rekawa, Seno, Bokor, Jeffery
Publikováno v:
Naulleau, Patrick; Goldberg, Kenneth A.; Anderson, Erik H.; Batson, Phillip; Denham, Paul; Jackson, Keith; et al.(2001). Adding static printing capabilities to the EUV phase-shifting point diffraction interferometer. Lawrence Berkeley National Laboratory. Lawrence Berkeley National Laboratory: Lawrence Berkeley National Laboratory. Retrieved from: http://www.escholarship.org/uc/item/01c4d1g0
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od_______325::59edbbefa89c5fd9d7df8f637652dcb7
http://www.escholarship.org/uc/item/01c4d1g0
http://www.escholarship.org/uc/item/01c4d1g0
Publikováno v:
Jeong, Seongtae; Lai, Chih-Wei; Rekawa, Seno; Walton, Chris W.; & Bokor, Jeffrey. (2000). Actinic defect counting statistics over 1 cm2 area of EUVL mask blank. Lawrence Berkeley National Laboratory. Lawrence Berkeley National Laboratory: Lawrence Berkeley National Laboratory. Retrieved from: http://www.escholarship.org/uc/item/6zp799ts
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od_______325::c49a65001335859569421e72c555355b
http://www.escholarship.org/uc/item/6zp799ts
http://www.escholarship.org/uc/item/6zp799ts
Akademický článek
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Autor:
Naulleau, Patrick, Anderson, Christopher N., Baclea-an, Lorie-Mae, Denham, Paul, George, Simi, Goldberg, Kenneth A., Jones, Gideon, McClinton, Brittany, Miyakawa, Ryan, Mochi, Iacopo, Montgomery, Warren, Rekawa, Seno, Wallow, Tom
Publikováno v:
Proceedings of SPIE; Nov2011, Issue 1, p798509-798509-10, 10p
Autor:
Naulleau, Patrick, Goldberg, Kenneth A., Anderson, Erik, Cain, Jason P., Denham, Paul, Hoef, Brian, Jackson, Keith, Morlens, Anne-Sophie, Rekawa, Seno, Dean, Kim
Publikováno v:
Proceedings of SPIE; Nov2005, Issue 1, p56-63, 8p