Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Reijiro Ikada"'
Publikováno v:
Thin Solid Films. :73-76
Nanocrystalline diamond deposition is investigated under a control of electron temperature in CH4/H2/Ar plasma produced by inductively coupled rf discharge. A grid-biasing method is employed for the control of electron temperature Te. When Te in the
Publikováno v:
Diamond and Related Materials. 14:279-282
Nucleation of diamond crystal is observed on a surface of fine diamond particles of micron meters attached to a nickel plate placed in methane–hydrogen plasma. The electron temperature Te in the plasma is quite important for the nucleation. When Te
Autor:
Reijiro Ikada, Satoru Iizuka
Publikováno v:
Diamond and Related Materials. 14:446-450
Effect of gas-mixing ratio on the formation of nanocrystalline diamond has been investigated in a low electron temperature CH4/H2/Ar plasma produced by inductively coupled rf discharge. The gas-mixing ratio is controlled by introducing an orifice bet
Publikováno v:
Thin Solid Films. 457:55-58
A noble method for the production of high density and low electron temperature plasma is presented. In plasma enhanced chemical vapor depositions, electron temperature affects the quality of deposited films, so a low-electron-temperature plasma is re
Publikováno v:
56th International Astronautical Congress of the International Astronautical Federation, the International Academy of Astronautics, and the International Institute of Space Law.
Publikováno v:
56th International Astronautical Congress of the International Astronautical Federation, the International Academy of Astronautics, and the International Institute of Space Law.
Publikováno v:
Applied Physics Letters. 88(12):121503-121503-3
A technique is presented for producing a low density plasma by introducing a coaxially segmented parallel-plate radio-frequency discharge for void-free dusty-cloud formation. Main plasma for the dusty plasma experiment is produced in a central core p