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We present the findings from an experimental study of a MEMS flow sensor in which an initially curved, double-clamped bistable microbeam is the primary sensing element. Our research explores how the overheat ratio, direct flow loading, and turbulence
Externí odkaz:
http://arxiv.org/abs/2312.12860
Publikováno v:
In Sensors and Actuators: A. Physical 1 July 2024 372