Zobrazeno 1 - 10
of 22
pro vyhledávání: '"Rebekah D'Arcy"'
Publikováno v:
Journal of Modern Optics. 59:855-872
The continuation of Moore's law for semiconductor fabrication envisages the introduction of extreme ultraviolet lithography (EUVL) based on a source wavelength of 13.5 nm for high-volume manufacturing within the next few years. While exposure tools h
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::459a35d4a80118d8d2a4153dff87b3f7
https://doi.org/10.1080/09500340.2012.678399
https://doi.org/10.1080/09500340.2012.678399
Autor:
Gerry O'Sullivan, Rebekah D’Arcy, Cormac McGuinness, Eugene T. Kennedy, John Costello, Jean-Paul Mosnier
Publikováno v:
Journal of Physics B: Atomic, Molecular and Optical Physics. 33:1383-1401
The photoabsorption spectra of Sb+ , Sb2+ , Sb3+ and Sb4+ have been obtained in the XUV spectral region with the dual laser-produced plasma (DLP) technique. Photoexcitation from the 4d subshell is the dominant process in the 30-100 eV energy region.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5f6b55d3b3277f49898aee89fe35b3e6
https://doi.org/10.1088/0953-4075/33/7/307
https://doi.org/10.1088/0953-4075/33/7/307
Publikováno v:
Journal of Physics B: Atomic, Molecular and Optical Physics. 32:4859-4876
The 4d inner-shell absorption spectra of Sb, Sb+, Sb2+ and Sb3+ have been obtained with the dual-laser-produced plasma technique. Discrete structure has been observed in the 30-40 eV region and identified as originating from 4d-5p transitions by comp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f2aed1901fe078adcd8d69df2b8905db
https://doi.org/10.1088/0953-4075/32/20/304
https://doi.org/10.1088/0953-4075/32/20/304
Autor:
Bowen Li, Takako Kato, Hiroaki Nishimura, Gerard O'Sullivan, Hajime Tanuma, Chihiro Suzuki, Oran Morris, S Suda, Rebekah D’Arcy, Hayato Ohashi, Fumihiro Koike, Shinsuke Fujioka, Katsunobu Nishihara
Publikováno v:
Physical Review A. 85
Charge-state-specific spectra produced from charge exchange collisions between xenon ions and helium target atoms using an ECR (electron cyclotron resonance) source have been recorded in extreme ultraviolet (EUV). At low target gas pressures, the spe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::44128fc5b82d010a5e6fe5284518f392
https://doi.org/10.1103/physreva.85.062513
https://doi.org/10.1103/physreva.85.062513
Autor:
I. Murakami, Deirdre Kilbane, G O'Sullivan, K. Sato, S. Sudo, Colm S. Harte, C. Suzuki, D. Kato, Rebekah D’Arcy, Hiroyuki A. Sakaue, Naoki Tamura, T Kato, Emma Sokell, Motoshi Goto
Publikováno v:
AIP Conference Proceedings.
We have measured extreme ultraviolet (EUV) spectra in the 20 nm region from tungsten ions in plasmas produced in the Large Helical Device (LHD) at the National Institute for Fusion Science. The spectra are recorded by a grazing incidence spectrometer
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::589687a5721b536217a669e1ee9f1a0c
https://doi.org/10.1063/1.4707877
https://doi.org/10.1063/1.4707877
Autor:
Hiromitsu Terauchi, Noboru Yugami, Takeshi Higashiguchi, Toyohiko Yatagai, Gerard O'Sullivan, Rebekah D’Arcy, Takamitsu Otsuka, Padraig Dunne, Mami Yamaguchi
Publikováno v:
SPIE Proceedings.
We characterize the emission spectra of a potassium plasma and its temporal behavior at 39 nm. To understanding the potassium spectral behavior without contamination effect, we use a laser-produced plasma to control the plasma parameters by changing
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8f4a028cafe89dc2f27ed4dc5cdf3573
https://doi.org/10.1117/12.892899
https://doi.org/10.1117/12.892899
Autor:
Rebekah D’Arcy, Hajime Tanuma, S Suda, Oran Morris, Katsunobu Nishihara, Hayato Ohashi, Chihiro Suzuki, Shinsuke Fujioka, Gerry O'Sullivan, Fumihiro Koike, Takako Kato, Hiroaki Nishimura
Charge-state-specific extreme ultraviolet spectra from both tin ions and xenon ions have been recorded at Tokyo Metropolitan University. The electron cyclotron resonance source spectra were produced from charge exchange collisions between the ions an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::34844e485cd701f2c289b906e5ab62dd
Autor:
Colm S. Harte, Gerry O'Sullivan, Chihiro Suzuki, Daiji Kato, Naoki Yamamoto, Hiroyuki A. Sakaue, S. Sudo, Takako Kato, Kuninori Sato, Hajime Tanuma, Izumi Murakami, Hayato Ohashi, Naoki Tamura, Rebekah D’Arcy
Publikováno v:
AIP Conference Proceedings.
Extreme ultra‐violet (EUV) emission spectra from highly charged tin, xenon and tungsten ions have been measured in optically thin high‐temperature plasmas produced in the Large Helical Device (LHD) at the National Institute for Fusion Science by
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7a221c2d96194bf0c8a977fe3bf5d2e7
https://doi.org/10.1063/1.3585803
https://doi.org/10.1063/1.3585803
Autor:
J. White, Hayato Ohashi, Rebekah D’Arcy, Chihiro Suzuki, G O'Sullivan, Takako Kato, Hiroaki Nishimura, Fumihiro Koike, Shinsuke Fujioka, Hajime Tanuma, S Suda, Katsunobu Nishihara
Publikováno v:
Physical Review A. 79
Charge state specific euv spectra from a range of tin ions have been recorded at Tokyo Metropolitan University. The spectra were produced from charge-exchange collisions between tin ions and helium atoms using an electron cyclotron resonance source.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::eedbd3e19d6d1423e0ca5915f54753a5
https://doi.org/10.1103/physreva.79.042509
https://doi.org/10.1103/physreva.79.042509
Autor:
Dror Alumot, Yitzhak Maron, Eyal Kroupp, B.V. Weber, G. Rozenzweig, D. Osin, Amnon Fisher, C. Deeney, D. Mosher, R.A. Commisso, Rebekah D’Arcy, Stuart L. Jackson
Publikováno v:
2008 IEEE 35th International Conference on Plasma Science.
Two systems were developed for measuring the time-dependent 3D density distribution of a cylindrical gas jet injected into vacuum through a triple valve-nozzle system: i) planar-laser-induced-fluorescence (PLIF), where the density distribution in eit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e7952daf043df541c66829a864f8cbce
https://doi.org/10.1109/plasma.2008.4590877
https://doi.org/10.1109/plasma.2008.4590877