Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Rebecca Clain"'
Publikováno v:
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::544c369cd994a7fb2d374129b6cd3e17
https://doi.org/10.1109/asmc54647.2022.9792527
https://doi.org/10.1109/asmc54647.2022.9792527
Publikováno v:
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2f5a9b6019912090668fd72b5d227157
https://doi.org/10.1109/asmc54647.2022.9792514
https://doi.org/10.1109/asmc54647.2022.9792514
Publikováno v:
CASE
Nowadays, virtual metrology models for semiconductor manufacturing aim to be scalable. A Virtual Metrology (VM) system is intended to cover a wide spectrum of production contexts. However, due to the large numbers of possible combinations of recipes,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cfdcb79d3db39c64636e2e54dff98353
https://doi.org/10.1109/case49439.2021.9551567
https://doi.org/10.1109/case49439.2021.9551567