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pro vyhledávání: '"Rebecca Burgin"'
Autor:
Wentao Qin, Rebecca Burgin, Gordy Grivna, Jim Steinwall, Scott Donaldson, J.P. Gambino, George Chang, Chuck Belisle, Lahcen Boukhanfra, Denise Barrientos, Dan Rogers, Julien Thiefain
Publikováno v:
Microelectronics Reliability. 120:114102
The resistance between an aluminum (Al) metal line and a tungsten (W) via increased after thermal stress. In the wafer processing, the post W chemical mechanical planarization (WCMP) cleaning left residual WO3 on the W plug. Since the resistivity of
Autor:
Sudhama C. Shastri, Keith Kamekona, Guy Averett, Brian Schoonover, Will Z. Cai, Dorai Iyer, Damien Gilmore, Rebecca Burgin
Publikováno v:
Journal of Applied Physics. 95:367-372
The chemical composition of oxynitride films obtained by furnace oxidation of silicon nitride (Si3N4) in a dry or wet oxygen ambient at a substrate temperature of 900–1000 °C is characterized using x-ray photoelectron spectroscopy and cross-sectio