Zobrazeno 1 - 9
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pro vyhledávání: '"Ray Malone"'
Autor:
Ray Malone
Publikováno v:
Colorado Review. 45:133-134
Publikováno v:
2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.
This paper presents a new type of control scheme and device for controlling gas flow into semiconductor process chambers. The key component of the Gas Flow Controller (GFC) is a high-precision valve with an integrated position sensor, which is used t
Autor:
Sebastian Mauermann, Andreas Wiswesser, Ray Malone, Björn Sass, Ralf Schubert, Thomas Jakubski, Karl-Heinz Gindra, Pavel Nesladek
Publikováno v:
Photomask Technology 2008.
In order to fulfil the upcoming requirements for photomasks there is a need for improving the process stability (reproducibility) of the unit processes in photomask fabrication. In order to understand and minimize the etch contribution to the CD stab
Autor:
G. Ray Malone, Albert I. Meyers
Publikováno v:
The Journal of Organic Chemistry. 39:623-628
Autor:
G. Ray Malone, Albert I. Meyers
Publikováno v:
The Journal of Organic Chemistry. 39:618-623
Publikováno v:
Tetrahedron Letters. 11:3715-3718
Publikováno v:
Organic Preparations and Procedures. 1:193-199
Autor:
G. Ray Malone, A. I. Meyers
Publikováno v:
The Journal of Organic Chemistry. 39:713-714
Publikováno v:
Journal of the American Chemical Society. 91:5886-5887