Zobrazeno 1 - 10
of 44
pro vyhledávání: '"Ravikiran Attota"'
Autor:
Ravikiran Attota, Armando Anaya
Publikováno v:
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5fd450000f0fa0706a01e18a6528eb50
https://doi.org/10.1109/asmc57536.2023.10121112
https://doi.org/10.1109/asmc57536.2023.10121112
Autor:
Ravikiran Attota, John A. Kramar
Publikováno v:
Proceedings of SPIE--the International Society for Optical Engineering. 9778
Through-focus scanning optical microscopy (TSOM) shows promise for patterned defect analysis, but it is important to minimize total system noise. TSOM is a three-dimensional shape metrology method that can achieve sub-nanometer measurement sensitivit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fe91733371fe20a1250cdfd8aa9c96fd
https://pubmed.ncbi.nlm.nih.gov/28663666
https://pubmed.ncbi.nlm.nih.gov/28663666
Autor:
Ravikiran Attota
Publikováno v:
Optics letters. 41(4)
A systematic noise-analysis study for optimizing data collection and data processing parameters for through-focus scanning optical microscopy (TSOM) is presented. TSOM is a three-dimensional shape metrology method that can achieve sub-nanometer measu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e8c464eaa90bdf97430554629f754181
https://pubmed.ncbi.nlm.nih.gov/26872178
https://pubmed.ncbi.nlm.nih.gov/26872178
Autor:
Ravikiran Attota, Vibhu Jindal
Publikováno v:
SPIE Newsroom.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::489f18b1223aab3b53c2485fa6df3845
https://doi.org/10.1117/2.1201307.004964
https://doi.org/10.1117/2.1201307.004964
Publikováno v:
SPIE Proceedings.
In-line metrologies currently used in the semiconductor industry are being challenged by the aggressive pace of device scaling and the adoption of novel device architectures. In defect inspection, conventional bright field techniques will not likely
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6084065ee6d87b3cccaf02f939d8f54d
https://doi.org/10.1117/12.2013777
https://doi.org/10.1117/12.2013777
Publikováno v:
SPIE Proceedings.
This paper reports on an investigation to determine whether through-focus scanning optical microscopy (TSOM) is applicable to micrometer-scale through-silicon via (TSV) reveal metrology. TSOM has shown promise as an alternative inspection and dimensi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::49cb0d502ecf8138db887df6160eb633
https://doi.org/10.1117/12.2012609
https://doi.org/10.1117/12.2012609
Autor:
Ravikiran, Attota, Jahanmir[*], Said
Publikováno v:
Journal of the American Ceramic Society. Jul2000, Vol. 83 Issue 7, p1831. 3p. 1 Black and White Photograph, 3 Graphs.
Publikováno v:
SPIE Proceedings.
Jet-and-Flash Imprint Lithography (J-FIL) has demonstrated capability of high-resolution patterning at low costs. For accurate pattern transfer using J-FIL, it is necessary to have control of the residual layer thickness (RLT) of cured resist underne
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3d049abaccdef12e5e7c258294cba66d
https://doi.org/10.1117/12.916958
https://doi.org/10.1117/12.916958
Publikováno v:
SPIE Proceedings.
Through-focus scanning optical microscopy (TSOM) is a novel method [1-8] that allows conventional optical microscopes to collect dimensional information down to the nanometer level by combining 2D optical images captured at several through-focus posi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6dc329b32f56462b04cfccf7635a65ee
https://doi.org/10.1117/12.917236
https://doi.org/10.1117/12.917236
Publikováno v:
SPIE Proceedings.
A novel through-focus scanning optical microscopy (TSOM) method that yields nanoscale information from optical images obtained at multiple focal planes will be used here for nanoparticle dimensional analysis. The TSOM method can distinguish not only
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::878fad000119512202f20710c29e7374
https://doi.org/10.1117/12.918263
https://doi.org/10.1117/12.918263