Výsledky vyhledávání - "Ravi Mullapdi"

Titanium Hafnium Oxide Alloy Films by a Novel Sub-Atomic Layer Sputtering Process for High Index and Graded Index Applications

Autor: David M. Fryauf, Ravi Mullapdi, Nobuhiko P. Kobayashi, Kate J. Norris, Junce Zhang, Amanda Flores, Tana Arunagiri, R. Ernest Demaray, Juan J. Diaz Leon, Lai Lu

Publikováno v: MRS Proceedings. 1565

We studied physical properties of titanium hafnium oxide (TixHf1-xO2) alloy thin films deposited by pulsed DC reactive magnetron sputtering with AC substrate bias. Thin films of two end oxides, hafnium oxides (HfO2) and titanium oxides (TiO2), and th

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::6c1fcab9aa69efe222cd0bacc7e837e1
https://doi.org/10.1557/opl.2013.1089

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