Zobrazeno 1 - 10
of 15
pro vyhledávání: '"Ravi Kiran Attota"'
Publikováno v:
J Vac Sci Technol B Nanotechnol Microelectron
This paper reports high-throughput, light-based, through-focus scanning optical microscopy (TSOM) for detecting industrially relevant sub-50 nm tall nanoscale contaminants. Measurement parameter optimization to maximize the TSOM signal using optical
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5be3607dfc0a7e2164e82f33e3d8bece
https://pubmed.ncbi.nlm.nih.gov/34131513
https://pubmed.ncbi.nlm.nih.gov/34131513
Autor:
Ravi Kiran Attota
Publikováno v:
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Using only two derived numbers based on a reference library, this paper shows how through-focus scanning optical microscopy (TSOM) is compatible with computational process control (CPC) for the complete 3Dshape process monitoring of nanoscale to micr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1f92565545f79d74f54516999468b7d1
https://doi.org/10.1109/asmc49169.2020.9185358
https://doi.org/10.1109/asmc49169.2020.9185358
Autor:
Keana C. Scott, Richard A. Allen, Ravi Kiran Attota, Benjamin Bunday, Hyeonggon Kang, András E. Vladár
Publikováno v:
Measurement sciencetechnology. 29(12)
Low-cost, high-throughput and nondestructive metrology of truly three-dimensional (3-D) targets for process control/monitoring is a critically needed enabling technology for high-volume manufacturing (HVM) of nano/micro technologies in multi-discipli
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ce5943f35ac0cd431fb65efdb71590d0
https://pubmed.ncbi.nlm.nih.gov/31092982
https://pubmed.ncbi.nlm.nih.gov/31092982
Autor:
Ravi Kiran Attota
Publikováno v:
Optics express. 26(15)
Rapid increase in interest and applications of through-focus (TF) or volumetric type of optical imaging in biology and other areas has resulted in the development of several TF image collection methods. Achieving quantitative results from images requ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::58f9d2394b40051c0b4f9670b9bc9804
https://pubmed.ncbi.nlm.nih.gov/30114170
https://pubmed.ncbi.nlm.nih.gov/30114170
Autor:
Ravi Kiran Attota
Publikováno v:
Unconventional Optical Imaging.
We present a partial application space of the metrology method referred to as through-focus scanning optical microscopy (TSOM), with most number of favorable attributes as a metrology and process control tool. TSOM is a NIST-developed, high-throughpu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a533288560ae43c669bc85267ebb7647
https://doi.org/10.1117/12.2302592
https://doi.org/10.1117/12.2302592
Autor:
Ravi Kiran Attota
Publikováno v:
Journal of biomedical optics. 23(7)
In recent years the use of through-focus (TF) or volumetric type of optical imaging has gained momentum in several areas such as biological imaging, microscopy, adaptive optics, material processing, optical data storage, and optical inspection. In th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::85c27af29273222c4b233748e8297a3f
https://pubmed.ncbi.nlm.nih.gov/29981229
https://pubmed.ncbi.nlm.nih.gov/29981229
Autor:
Ravi Kiran Attota, Emil Agocs
Publikováno v:
Scientific Reports
Scientific Reports, Vol 8, Iss 1, Pp 1-9 (2018)
Scientific Reports, Vol 8, Iss 1, Pp 1-9 (2018)
There has been an increasing push to derive quantitative measurements using optical microscopes. While several aspects of microscopy have been identified to enhance quantitative imaging, non-uniform angular illumination asymmetry (ANILAS) across the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d3bedb910a477d9744cd71b230a38c40
https://doi.org/10.1038/s41598-018-22561-w
https://doi.org/10.1038/s41598-018-22561-w
Autor:
Ravi Kiran Attota
Publikováno v:
Imaging and Applied Optics 2018 (3D, AO, AIO, COSI, DH, IS, LACSEA, LS&C, MATH, pcAOP).
Through-focus scanning optical microscopy (TSOM) is sensitive to three-dimensional shape changes of nanoscale to microscale targets. Here we demonstrate process monitoring method of 3D targets using TSOM down to sub-nanometer.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::43eb00ac738e6fbfba3636db45453dc7
https://doi.org/10.1364/aio.2018.aw3a.1
https://doi.org/10.1364/aio.2018.aw3a.1
Autor:
Ravi Kiran Attota
Publikováno v:
Optics express. 24(20)
For far-field optical imaging of three-dimensional objects and such critical applications as quantitative optical imaging, optical metrology, and optical lithography, it is necessary not only to meet the Kohler illumination condition (i.e. uniform sp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::21a5086a8c1eafcfd3d3e1b97e5739a4
https://pubmed.ncbi.nlm.nih.gov/27828332
https://pubmed.ncbi.nlm.nih.gov/27828332
In-line metrologies currently used in the semiconductor industry are being challenged by the aggressive pace of device scaling and the adoption of novel device architectures. Metrology and process control of three-dimensional (3-D) high-aspect-ratio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e33626d17422af00d17842eff4151379
https://europepmc.org/articles/PMC4986611/
https://europepmc.org/articles/PMC4986611/
