Výsledky vyhledávání - "Rasmus Lou-Møller"

Advantages of PZT thick film for MEMS sensors

Autor: Rasmus Lou-Møller, Kristoffer Lindskov Hansen, Erik Vilain Thomsen, Christian Carstensen Hindrichsen

Publikováno v: Sensors and Actuators A: Physical. 163:9-14

For all MEMS devices a high coupling between the mechanical and electrical domain is desired. Figures of merit describing the coupling are important for comparing different piezoelectric materials. The existing figures of merit are discussed and a ne

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::5517c36b69ede6a6e828a7a8e71ec36f
https://doi.org/10.1016/j.sna.2010.05.004

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Investigation of top electrode for PZT thick films based MEMS sensors

Autor: Paw Kristiansen, Karsten Kryger Hansen, Thomas Garm Pedersen, Rasmus Lou-Møller, Christian Carstensen Hindrichsen, Erik Vilain Thomsen

Publikováno v: Journal of Electroceramics. 25:150-158

In this work processing of screen printed piezoelectric PZT thick films on silicon substrates is investigated for use in future MEMS devices. E-beam evaporated Al and Pt are patterned on PZT as a top electrode using a lift-off process with a line wid

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::aac41fa8f23bea586a0f2ddf88680a48
https://doi.org/10.1007/s10832-010-9606-7

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Triaxial MEMS accelerometer with screen printed PZT thick film

Autor: Rasmus Lou-Møller, Ninia Sejersen Almind, Erik Vilain Thomsen, Simon Hedegaard Brodersen, Karsten Kryger Hansen, Christian Carstensen Hindrichsen

Publikováno v: Journal of Electroceramics. 25:108-115

Piezoelectric thick films have increasing interest due to the potential high sensitivity and actuation force for MEMS sensors and actuators. The screen printing technique is a promising deposition technique for realizing piezoelectric thick films in

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::1e9aa3e003b93b45a80448eee07b0db8
https://doi.org/10.1007/s10832-010-9597-4

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MEMS-based thick film PZT vibrational energy harvester

Autor: Karen Birkelund, Rasmus Lou-Møller, Karsten Kryger Hansen, Ruichao Xu, Anders Lei, Anders Thyssen, Erik Vilain Thomsen, Thomas Christiansen, Adam Carsten Stoot

Publikováno v: 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

We present a MEMS-based unimorph silicon/PZT thick film vibrational energy harvester with an integrated proof mass. We have developed a process that allows fabrication of high performance silicon based energy harvesters with a yield higher than 90%.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::b4d6c69f4f0a1d3dd85f45b67f839ce3
https://doi.org/10.1109/memsys.2011.5734377

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