Zobrazeno 1 - 10
of 15
pro vyhledávání: '"Rashid Mavliev"'
Autor:
Robert Rhoades, Rashid Mavliev
Publikováno v:
2020 International Wafer Level Packaging Conference (IWLPC).
Interconnects are one of the most difficult steps in the manufacturing process, particularly at advanced process nodes with more metal layers to connect, both internally and externally. The Cu damascene process is widely applied in BEOL of IC industr
Publikováno v:
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
A novel method for selective deposition of metal features has been developed and evaluated for several different metallization applications in device manufacturing and advanced packaging technologies. Selectroplating® is based on a selective chemica
Publikováno v:
2020 IEEE 70th Electronic Components and Technology Conference (ECTC).
Thin film deposition of metals is necessary in the fabrication sequence of most electronic devices, but much of the deposited metal is actually wasted in the subsequent patterning steps. In the case of copper interconnects for advanced semiconductor
Autor:
Rashid Mavliev
Publikováno v:
2017 China Semiconductor Technology International Conference (CSTIC).
Slurry is one of most critical yield defining components of CMP process and potential source of problems. Timely and proper monitoring of slurry parameters is critical for CMP yield improvement. Slurry is very complex system - the combination of chem
Publikováno v:
The journal of physical chemistry. B. 107(50)
Using a modified turbulent mixing CNC, the heterogeneous nucleation of different compounds (working fluids) on nanometer sized carbon particles was examined. The working fluids were dibutyl phthalate, octadecane, octadecanol, and octadecanoic acid. B
Experimental Studies of Heterogeneous Nucleation in the Turbulent Mixing Condensation Nuclei Counter
Publikováno v:
The Journal of Physical Chemistry B. 108:4558-4564
A method for varying the supersaturation in a turbulent mixing CNC has been used to examine heterogeneous nucleation of different compounds (working fluid) on various nuclei's compositions. Supersaturation was controlled by changing the vapor pressur
Publikováno v:
Aerosol Science and Technology. 35:586-595
A new method for changing the supersaturation in the Turbulent Mixing CNC has been developed and used to examine the transition from heterogeneous nucleation of test particles to homogenous nucleation of working fluid: dibutylphthlate (DBP). Supersat
Autor:
Rashid Mavliev, Craig A. Parsons
Publikováno v:
Aerosol Science and Technology. 34:309-320
We describe the development and performance of a new, continuous-flow, single-particle, condensation nucleus counter (CNC) that uses water as its working fluid. Supersaturation is generated both through mixing of the ambient temperature sample gas st
Autor:
Rashid Mavliev, Hwa-Chi Wang
Publikováno v:
Journal of Aerosol Science. 31:933-944
The design and optimization of operation parameters of a Turbulent Mixing Condensation Nuclei Counter (TMCNC) are discussed as well as its performance using dibutylphthalate (DBP) as the working fluid. A detection limit of 3 nm has been achieved at a
Publikováno v:
Aerosol Science and Technology. 29:433-441
A model based on the equations for particle trajectory in a supersonic, one-dimensional, compressible flow was developed. The model was used to provide calibration curves for determination of particle size for time-of-flight instruments. In this stud