Zobrazeno 1 - 10
of 19
pro vyhledávání: '"Rashed Mahameed"'
Autor:
Rashed Mahameed, Gabriel M. Rebeiz
Publikováno v:
IEEE Transactions on Microwave Theory and Techniques. 59:1746-1752
In this paper, the design, fabrication, and measurements of a capacitive RF microelectromechanical systems (RF MEMS) switch with very low sensitivity to thermal stress is presented. The switch is built by thin-film technology (0.8-μm Au) and shows
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d99fc7ad264cbba9632fd250bd466fd8
https://doi.org/10.1109/tmtt.2011.2135376
https://doi.org/10.1109/tmtt.2011.2135376
Autor:
David Elata, Rashed Mahameed
Publikováno v:
Microsystem Technologies. 15:323-331
In this work it is theoretically shown that thermoelastic incompatibility between Silicon structures and their native-oxide layers induces thermoelastic damping. This damping dominates in structures that are packaged in vacuum and vibrate in pure axi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a980dc9a29aca5d844398c8319bb59d2
https://doi.org/10.1007/s00542-008-0667-3
https://doi.org/10.1007/s00542-008-0667-3
Autor:
Rashed Mahameed, David Elata
Publikováno v:
Journal of Micromechanics and Microengineering. 15:1414-1424
This work considers microresonators that are driven by a temperature-gradient actuator. The driving forces in the temperature-gradient actuation scheme are internal mechanical moments induced by temperature gradients. In this work, a model for analyz
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e72d77a85995964b7e750a9e68cb5022
https://doi.org/10.1088/0960-1317/15/8/006
https://doi.org/10.1088/0960-1317/15/8/006
Autor:
Patrick Morrow, S-J Choi, Mohamed A. Abdelmoneum, R. Brain, Rashed Mahameed, D. Duarte, Fischer Paul B, Greg Taylor
Publikováno v:
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).
A novel fully monolithic MEMS based thermal sensor for high resolution thermal management is demonstrated in a 22 nm CMOS technology. Top metal layers are used as the structural material for the MEMS clamped-clamped beam resonators used as a thermal
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b001b5ca30b8dd0ed1598277cda79e04
https://doi.org/10.1109/transducers.2013.6626871
https://doi.org/10.1109/transducers.2013.6626871
Publikováno v:
2011 IEEE MTT-S International Microwave Symposium.
This paper presents miniature RF MEMS switched capacitors with pull-down and pull-up electrodes for increased capacitance ratio and power handling. A 2×2 switch array has three operation states: up-state, down-state and up-up state (switch attached
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5a3c7ad66f433e0e8591cca710e9fd2c
https://doi.org/10.1109/mwsym.2011.5973338
https://doi.org/10.1109/mwsym.2011.5973338
Autor:
Robert W. Carpick, Valery V. Felmetsger, Nipun Sinha, Rashed Mahameed, Gianluca Piazza, Shawn M. Tanner, Graham E. Wabiszewski
Publikováno v:
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
This paper reports the first implementation of ultra thin (100 nm) Aluminum Nitride (AlN) piezoelectric layers for the fabrication of vertically deflecting nano-actuators. An average piezoelectric coefficient (d 31 ∼ − 1.9 pC/N) that is comparabl
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e0e12914511510bc08db8cf4139132ac
https://doi.org/10.1109/sensor.2009.5285460
https://doi.org/10.1109/sensor.2009.5285460
Publikováno v:
2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time forum.
In this paper, we present the first demonstration of the monolithic integration of Aluminum Nitride (AlN) micromechanical contour mode technology filters with dual-beam actuated MEMS AlN switches. This integration has lead to the development of the f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3588b1bd13f4a1c5be42022f7f69c835
https://doi.org/10.1109/freq.2009.5168131
https://doi.org/10.1109/freq.2009.5168131
Publikováno v:
2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
This work reports on the design, fabrication and te sting of a new class of hybrid (filter design using combined e lectrical and mechanical coupling techniques) ultra-compact (800◊120 �m) 4 th order band-pass filters based on piezoelectric Alum i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::98fbcd6fbb394b5447f4ec72e2fcfc30
https://doi.org/10.31438/trf.hh2008.84
https://doi.org/10.31438/trf.hh2008.84
Publikováno v:
2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2a4bd19648f1964ed9e6f028cfb6f737
https://doi.org/10.31438/trf.hh2008.6
https://doi.org/10.31438/trf.hh2008.6
12E-3 Channel-Select RF MEMS Filters Based on Self-Coupled AlN Contour-Mode Piezoelectric Resonators
Publikováno v:
2007 IEEE Ultrasonics Symposium Proceedings.
This paper reports experimental results on a new class of single-chip multi-frequency channel-select filters based on self-coupled aluminum nitride (AlN) contour-mode piezoelectric resonators. For the first time, two-port AlN contour- mode resonators
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dd36bb05dc6423c2e8b9115e7eddbc70
https://doi.org/10.1109/ultsym.2007.292
https://doi.org/10.1109/ultsym.2007.292