Výsledky vyhledávání - "Raphaël Cozzolino"

Characterization of ZrOxCyHz thin films deposited by MMP–DECR reactor using Zirconium Tert-Butoxide/O2 mixture

Autor: Patrice Raynaud, Yvan Segui, Raphaël Cozzolino

Publikováno v: Surface and Coatings Technology. 205:S198-S203

Thin films are deposited in a multipolar microwave plasma reactor excited by distributed electron cyclotron resonance (MMP–DECR) using Zirconium Tert-Butoxide (ZTB) as precursor and characterized in function of two process parameters: microwave pow

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::6c657a5fd666a92dfce6e178017cd5be
https://doi.org/10.1016/j.surfcoat.2011.04.085

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DBD reactor design and optimization in continuous AP-PECVD from HMDSO/N2/N2O mixture

Autor: Hubert Caquineau, Petr Hotmar, Raphaël Cozzolino, Nicolas Gherardi

Publikováno v: The European Physical Journal Applied Physics. 73:20801

Dielectric barrier discharge (DBD) deposition of thin films is increasingly studied as a promising alternative to other non-thermal processes such as low-pressure plasma-enhanced chemical vapor deposition (PECVD) or wet-coating. In this paper we demo

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a212c3dc770e2125e861d6e44f398ae3
https://doi.org/10.1051/epjap/2016150525

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