Zobrazeno 1 - 10
of 125
pro vyhledávání: '"Rankin, Jed"'
Autor:
Liang, Ted, Kim, Seong-Sue, Green, Michael, Halle, Scott, Ramadan, Mohamed, Lallement, Romain, Kamberian, Henry, Burkhardt, Martin, Beineke, Jinju, Rankin, Jed, Progler, Chris, McDermott, Steven
Publikováno v:
Proceedings of SPIE; November 2023, Vol. 12751 Issue: 1 p127510M-127510M-9, 1147600p
Autor:
Philipsen, Vicky, Luong, Kim Vu, Opsomer, Karl, Detavernier, Christophe, Hendrickx, Eric, Erdmann, Andreas, Evanschitzky, Peter, Van De Kruijs, Robbert W.E., Heidarnia-Fathabad, Zahra, Scholze, Frank, Laubis, Christian, Gallagher, Emily E., Rankin, Jed H.
Publikováno v:
Photomask Technology 2018, 10810
In next-generation EUV imaging for foundry N5 dimensions and beyond, inherent pitch- and orientation-dependent effects on wafer level will consume a significant part of the lithography budget using the current Ta-based mask. Mask absorber optimizatio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2130b9fbfc0cb0bb0d1383ecf6d81a4d
https://doi.org/10.1117/12.2501799
https://doi.org/10.1117/12.2501799
Autor:
Green, Michael, Halle, Scott, Ramadan, Mohamed, Lallement, Romain, Kamberian, Henry, Burkhardt, Martin, Beineke, Jinju, Rankin, Jed, Progler, Chris, McDermott, Steven
Publikováno v:
Proceedings of SPIE; 12/20/2023, Vol. 12751, p127510M-127510M-9, 1p
Autor:
Masashi Yonetani, Karen Badger, Rankin, Jed, Shinji Akima, Yusuke Toda, Itaru Yoshida, Masayuki Kagawa, Takeshi Isogawa, Yutaka Kodera, Heumann, Jan, Birnstein, Anka
Publikováno v:
Proceedings of SPIE; 8/29/2019, Vol. 11178, p1-7, 7p
Autor:
Whiting, Charles, Bork, Ingo, Buck, Peter, Chia, Robin, Durvasula, Bharadwaj, Hill, Daniel M., Huda, Gazi, Jantzen, Ken, Leuthold, Matthew, Jianliang Li, Mellmann, Joerg, Mishra, Kushlendra, Rankin, Jed, Rao, Nageswara, Sharma, Malavika, Sharma, Rachit, Smith, Adam, Wentz, Michaela
Publikováno v:
Proceedings of SPIE; 7/30/2019, Vol. 11148, p1114805-1-1114805-12, 12p
Autor:
Gek Soon Chua, Weijie Lua, Yee Mei Foong, Weilong Wang, Bailey, Todd, Ackmann, Paul, Rankin, Jed
Publikováno v:
Proceedings of SPIE; 7/30/2019, Vol. 11148, p111480H-1-111480H-12, 12p
Autor:
Rankin, Jed H., Preil, Moshe E., Chua, Gek Soon, Lu, Weijie, Foong, Yee Mei, Wang, Weilong, Bailey, Todd, Ackmann, Paul, Rankin, Jed
Publikováno v:
Proceedings of SPIE; September 2019, Vol. 11148 Issue: 1 p111480H-111480H-12, 11036533p
Autor:
Vivian Wei Guo, Fan Jiang, Rankin, Jed, Bork, Ingo, Tritchkov, Alexander, Wei, Alexander, Yuyang Sun, Jayaram, Srividya, Larry Zhuang, Xima Zhang, Bailey, Todd, Word, James
Publikováno v:
Proceedings of SPIE; 8/26/2018, Vol. 10810, p108100P-1-108100P-13, 13p
Autor:
Bork, Ingo, Buck, Peter, Bürgel, Christian, Durvasula, Bhardwaj, Eder-Kapl, Stefan, Hudek, Peter, Jurkovic, Michal, Klikovits, Jan, Platzgummer, Elmar, Rankin, Jed H., Rao, Nageswara, Reddy, Murali, Spengler, Christoph
Publikováno v:
Proceedings of SPIE; 8/26/2018, Vol. 10810, p108100K-1-108100K-10, 10p