Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Randall G. Smith"'
Autor:
Mark A. Schulze, Randall G. Smith, Edgar Voelkl, Martin A. Hunt, C. E. Thomas, William R. Usry, Robert Bryant, Joel D. Hickson
Publikováno v:
Process and Materials Characterization and Diagnostics in IC Manufacturing.
Defect inspection metrology is an integral part of the yield ramp and process monitoring phases of semiconductor manufacturing. High aspect ratio structures have been identified in the ITRS as critical structures where there are no known manufacturab
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ec2f8ed7e1a53d143e197cd48857df11
https://doi.org/10.1117/12.485237
https://doi.org/10.1117/12.485237
Autor:
Robert W. Owen, Karsten S. Weber, Xiaolong Dai, William R. Usry, James S. Goddard, Tracy M. Bahm, Christopher Marek, Allen N. Su, George C. John, Judd M. Gilbert, Michael W. Mayo, Matthew D. Chidley, Michael L. Jones, Martin A. Hunt, Mark A. Schulze, C. E. Thomas, J.H. Price, Randall G. Smith, Edgar Voelkl, Bichuan Shen, David A Rasmussen, Joel D. Hickson, Ayman M. El-Khashab, Kenneth W. Tobin, Louis J. Schaefer, Philip R. Bingham, Gregory R. Hanson, Larry R. Baylor, Robert J. Delahanty, Kathy W. Hylton
Publikováno v:
AIP Conference Proceedings.
Direct to Digital Holography (DDH) has been developed as a semiconductor wafer inspection tool and in particular as a tool for seeing defects in high aspect ratio (HAR) structures on semiconductor wafers and also for seeing partial‐height defects.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ceea6527828de20a7d2c24d614924e79
https://doi.org/10.1063/1.1622480
https://doi.org/10.1063/1.1622480
Autor:
Larry R. Baylor, Robert J. Delahanty, Louis J. Schaefer, Philip R. Bingham, Kathy W. Hylton, Kenneth W. Tobin, Gregory R. Hanson, George C. John, Long Dai, Michael L. Jones, Joel D. Hickson, J.H. Price, Ayman M. El-Khashab, Michael W. Mayo, Christopher J. Doti, Robert L. Fisher, Mark A. Schulze, Thomas R. Scheidt, Martin A. Hunt, Judd M. Gilbert, Robert W. Owen, Paul G. Jones, William R. Usry, C. E. Thomas, Matt Chidley, Philip D. Schumaker, Tracy M. Bahm, Allen N. Su, Steven W. Burns, Karsten S. Weber, Bichuan Shen, Ian M. Mcmackin, Dave R. Patek, Ken R. Macdonald, James S. Goddard, David A Rasmussen, Randall G. Smith, Edgar Voelkl
Publikováno v:
SPIE Proceedings.
A method for recording true holograms (not holographic interferometry) directly to a digital video medium in a single image has been invented. This technology makes the amplitude and phase for every pixel of the target object wave available. Since ph
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fb53a81fb019ee0d7db5d3071ca13d6e
https://doi.org/10.1117/12.475659
https://doi.org/10.1117/12.475659