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Autor:
Trejo Rust, David McCarthy, Min Dai, Michael Brodfuehrer, Lingjie Wang, Colleen Meagher, Bruce Dyer, Raymond Van Roijen, Michael D. Steigerwalt, Javier Ayala, Gasner Barthold, Jeffery B. Maxson, Randal Bakken
Publikováno v:
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
A small but persistent signal in wafer slot order was observed at functional test, affecting logic yield. Through wafer slot Randomization at several operations in the route a process step within high-k metal gate formation was suspected to be causin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e03472cd16acdc49d18a862775295e23
https://doi.org/10.1109/asmc.2017.7969251
https://doi.org/10.1109/asmc.2017.7969251
