Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Ran Alkoken"'
Autor:
Woosung Jung, Jong-Hoi Cho, SungHun Lim, TaeSeop Lee, DaeYoung Choi, Jong-Hyun Seo, SeungHyun Lee, JunKyoung Lee, You Jin Kim, Jeong Ho Yeo, Alex Brikker, Roi Meir, Ran Alkoken, Kyeongju Han, Sujin Lim, KyungJae Choi, Chanhee Kwak, Hyeon Sang Shin
Publikováno v:
Metrology, Inspection, and Process Control XXXVII.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::41b6f2800baacf2b2ea1ac196ad2a202
https://doi.org/10.1117/12.2660114
https://doi.org/10.1117/12.2660114
Autor:
Woosung Jung, Jong-Hoi Cho, SungHun Lim, TaeSeop Lee, DaeYoung Choi, Jong-Hyun Seo, SeungHyun Lee, JunKyoung Lee, You Jin Kim, Jeong Ho Yeo, Alex Brikker, Roi Meir, Ran Alkoken, Kyeongju Han, Sujin Lim, KyungJae Choi, Chanhee Kwak, Hyeon Sang Shin
Publikováno v:
Metrology, Inspection, and Process Control XXXVII.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bd13b2f3c37821ab5a085303edb4c333
https://doi.org/10.1117/12.2660118
https://doi.org/10.1117/12.2660118
Autor:
Bobin Mathew, Shahar Arad, Omri Brand, Tal Frank, Ran Alkoken, Yael Shilo, Yarden Melamed, Rotem M. Yosef, Hyo Seon Suh, Seonggil Heo, Sandip Halder
Publikováno v:
Metrology, Inspection, and Process Control XXXVII.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::be66e4b70214ea5dd49c549efa4533ad
https://doi.org/10.1117/12.2658505
https://doi.org/10.1117/12.2658505
Autor:
Elad Sommer, Ran Alkoken, Tal Bar-On, Liraz Gershtein, Svetlana Pastur, Roman Kris, Hiroshi Miroku, Efrat Noifeld, I Horikawa, Ishai Schwarzband, Olga Novak, Grigory Klebanov, Sharon Duvdevani-bar, Dhananjay Singh Rathore, Bobin Mathew, Shimon Levy
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXXIII.
The growing demand for advanced DRAM technologies requires development of novel process control methodologies reflecting design rule shrinkage. The new challenges for CD SEM metrology of dense feature arrays of DRAM layers are widely considered in th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4077f68a2acbd3ff30056c8880190825
https://doi.org/10.1117/12.2515233
https://doi.org/10.1117/12.2515233