Zobrazeno 1 - 10
of 24
pro vyhledávání: '"Ramin Matloub"'
Publikováno v:
Physical Review Applied. 16
We present the fabrication of 570-$\ensuremath{\mu}\mathrm{m}$-thick millimeter-sized soda-lime-silicate float-glass blocks with a 1-$\ensuremath{\mu}\mathrm{m}$-thick $\mathrm{Al}\mathrm{N}$ thin-film piezoelectric transducer sandwiched between thin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fc2a177b43c56b0f63373ba5a4259c70
https://doi.org/10.1103/physrevapplied.16.014014
https://doi.org/10.1103/physrevapplied.16.014014
Autor:
Jordan Maufay, Ramin Matloub, Andreas Tortschanoff, Mohssen Moridi, Jaka Pribosek, Paul Muralt, Adrien Piot, Johannes Schicker
Publikováno v:
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS).
We report a transduction optimization method of piezo-based MEMS structures using segmentation of the excitation electrodes. Optimal transduction is achieved by matching the electric field distribution to the polarization distribution including the d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::56e079f05f29437ed74d3ee73bf2146b
https://doi.org/10.1109/mems46641.2020.9056124
https://doi.org/10.1109/mems46641.2020.9056124
Autor:
Paul Muralt, Waqas Bashir, Luis Guillermo Villanueva, Annalisa De Pastina, Kaitlin Howell, Ramin Matloub
Ultrathin aluminum nitride (AlN) films are of great interest for integration into nanoelectromechanical systems for actuation and sensing. Given the direct relationship between crystallographic texture and piezoelectric response, x-ray diffraction ha
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ead2f8328ce9d125aae13cf251a78274
http://arxiv.org/abs/1811.09156
http://arxiv.org/abs/1811.09156
Publikováno v:
Journal of Microelectromechanical Systems
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
A measurement setup for the detailed study of the transverse piezoelectric coefficient ${e} \mathbf {{}_{31,f}} $ in the converse (actuator) mode was developed. It allows the assessment of the piezoelectric stress in thin films on silicon cantilevers
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fc5b4dc364d42b30c43d104c72920e85
Autor:
Bernd Heinz, Vladimir Pashchenko, Thomas LaGrange, Cosmin S. Sandu, Paul Muralt, Fazel Parsapour, Ramin Matloub, Stefan Mertin
Publikováno v:
physica status solidi (a). 216:1970015
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3d5dec0f38d78f71a8f524cba2596af2
https://doi.org/10.1002/pssa.201970015
https://doi.org/10.1002/pssa.201970015
Autor:
Ken Haffner, Vladimir Pashchenko, Fazel Parsapourkolour, Ramin Matloub, Sylvain Ballandras, Paul Muralt
Publikováno v:
2016 IEEE International Ultrasonics Symposium (IUS).
A novel type of hybrid resonator based on BAW transformation into SAW in a ridged layered structure was fabricated and characterized. Bulk waves are excited by micromachined piezoelectric AlScN pillars located on the non-piezoelectric Si and sapphire
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fdb8d1e6df4dca860bd5bc59b000cc33
https://doi.org/10.1109/ultsym.2016.7728649
https://doi.org/10.1109/ultsym.2016.7728649
Autor:
Thomas LaGrange, Paul Muralt, Stefan Mertin, Ramin Matloub, Fazel Parsapour, Vladimir Pashchenko, Cosmin S. Sandu, Bernd Heinz
Publikováno v:
physica status solidi (a). 216:1800569
Sputter deposited Al(1-x)ScxN thin films with a Sc content from x = 0 to 43 at% are investigated by electron microscopy in order to study and explain the formation and growth of abnormally oriented grains (AOG). It is found that the latter did not nu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0a67c652760969f400109c70a07ad429
https://doi.org/10.1002/pssa.201800569
https://doi.org/10.1002/pssa.201800569
Publikováno v:
Applied Physics Letters. 110:184104
There is a need for sensors capable operating at temperatures above 1000 degrees C. We describe an innovative sensor that might achieve this goal. The sensor comprises two main elements: a thermocouple and a surface acoustic wave (SAW) strain sensor.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6162c7467eab11a8b0bb7c18482133a4
https://doi.org/10.1063/1.4983085
https://doi.org/10.1063/1.4983085
Publikováno v:
MRS Proceedings. 1674
Currently, large efforts are going on to scale up PZT thin film processes for large volume MEMS fabrication. It is critical to complete the scaling up with optimized film properties. In this work we report about microstructural control and piezoelect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b8afa0da04f0aae25f788c1a15d94e38
https://doi.org/10.1557/opl.2014.546
https://doi.org/10.1557/opl.2014.546
Microstructure and Dielectric Properties of Piezoelectric Magnetron Sputtered w-ScxAl1-xN thin films
Autor:
Ramin Matloub, Gunilla Wingqvist, Per Persson, Agne Zukauskaite, Paul Muralt, Justinas Palisaitis, Jens Jensen, Yunseok Kim, Jens Birch, Lars Hultman
Piezoelectric wurtzite ScxAl1-xN (x = 0, 0.1, 0.2, 0.3) thin films were epitaxially grown by reactive magnetron co-sputtering from elemental Sc and Al targets. Al2O3(0001) wafers with TiN(111) seed and electrode layers were used as substrates. X-ray
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3d49dd0005c85bdd8327fe0f7105491e
http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-76471
http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-76471