Zobrazeno 1 - 10
of 11
pro vyhledávání: '"Ramaswamy Sreenivasan"'
Autor:
David M. Hoganson, Joseph P. Vacanti, Thomas M. Cervantes, Erik K. Bassett, Ramaswamy Sreenivasan, Karen K. Gleason
Publikováno v:
Microfluidics and Nanofluidics. 12:835-839
A versatile solvent-free method for surface modification of various materials including both metals and polymers is described. Strong irreversible bonds were formed when substrates modified by initiated chemical vapor deposition (iCVD) of poly(1,3,5-
Ultra-thin, gas permeable free-standing and composite membranes for microfluidic lung assist devices
Autor:
Ramaswamy Sreenivasan, David M. Hoganson, Joseph P. Vacanti, Erik K. Bassett, Karen K. Gleason
Publikováno v:
Biomaterials. 32:3883-3889
Membranes for a lung assist device must permit the exchange of gaseous O₂ and CO₂ while simultaneously acting as a liquid barrier, so as to prevent leakage of blood and its components from passing from one side to the other. Additionally, these m
Autor:
Sreeram Vaddiraju, Salmaan H. Baxamusa, Nathan J. Trujillo, Gozde Ozaydin-Ince, Jingjing Xu, Karen K. Gleason, Mahriah E. Alf, Ramaswamy Sreenivasan, Christy D. Petruczok, Miles C. Barr, Ayse Asatekin, Wyatt E. Tenhaeff, Hitesh Chelawat
Publikováno v:
Advanced Materials. 22:1993-2027
Chemical vapor deposition (CVD) polymerization utilizes the delivery of vapor-phase monomers to form chemically well-defined polymeric films directly on the surface of a substrate. CVD polymers are desirable as conformal surface modification layers e
Publikováno v:
Chemical Vapor Deposition. 15:77-90
Vapor based polymer deposition methods have evolved to address the limitations of solution polymerization. However this field of vapor based polymerization suffers from varied nomenclature and would benefit from a review article that brought together
Publikováno v:
Journal of Crystal Growth. 310:270-283
Segmented CVD reactor designs enabling spatial control of across-wafer gas phase composition were evaluated for depositing graded films suitable for combinatorial studies. Specifically, two reactor designs were constructed and evaluated with experime
Autor:
Y. Xu, Laurent Henn-Lecordier, Ramaswamy Sreenivasan, John N. Kidder, E. Zafiriou, Gary W. Rubloff, Theodosia Gougousi
Publikováno v:
AIP Conference Proceedings.
A 300 amu closed-ion-source RGA (Leybold-Inficon Transpector 2) sampling gases directly from the reactor of an ULVAC ERA-1000 cluster tool has been used for real time process monitoring of a W CVD process. The process involves H2 reduction of WF6 at
Publikováno v:
Proceedings of the 2000 American Control Conference. ACC (IEEE Cat. No.00CH36334).
We have developed a series of interactive control education modules. They are intended to be useful to a broad audience of students as well as practitioners. Their main objective is to provide insight and intuition rather than precise mathematics.
Publikováno v:
Proceedings of the 1999 American Control Conference (Cat. No. 99CH36251).
We are developing six control engineering design modules for use by graduate students, advanced undergraduates, and practicing engineers in learning about process control. This is part of a larger project investigating the use of dynamic simulation a
Autor:
Yuhong Cai, Raymond A. Adomaitis, Gary W. Rubloff, Ramaswamy Sreenivasan, Laurent Henn-Lecordier, Jae-ouk Choo
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 25:1288
Mass spectrometry has proven valuable in understanding and controlling chemical processes used in semiconductor fabrication. Given the complexity of spatial distributions of fluid flow, thermal, and chemical parameters in such processes, multipoint c
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 24:2706
A new chemical vapor deposition (CVD) reactor design was developed to intentionally induce spatially nonuniform film thickness deposition patterns on a single wafer. A segmented showerhead design allows individual regions of a wafer to be exposed to