Zobrazeno 1 - 10
of 220
pro vyhledávání: '"Ralf Peter Brinkmann"'
Publikováno v:
Plasma Sources Science and Technology.
The Poisson-Boltzmann equation is a nonlinear partial differential equation that describes the equilibria of conducting fluids. Using a thermodynamic variational principle based on the balances of particle number, entropy, and electromagnetic enthalp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::18243a6e9b0193110bc8ff25d951b892
https://doi.org/10.1088/1361-6595/acd3a7
https://doi.org/10.1088/1361-6595/acd3a7
Autor:
Ilona Rolfes, Moritz Oberberg, Thomas Musch, Peter Awakowicz, Ralf Peter Brinkmann, Michael Friedrichs, Christian Schulz, Chunjie Wang, Jens Oberrath, Dennis Pohle, Martin Lapke, Junbo Gong, Thomas Mussenbrock
Publikováno v:
IEEE Transactions on Plasma Science. 49:3293-3298
During the last decade a new probe design for active plasma resonance spectroscopy, the multipole resonance probe (MRP), was proposed, analyzed, developed, and characterized in two different designs: the spherical MRP (sMRP) and the planar MRP (pMRP)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f3d987cdba892919caab354df7d7866d
https://doi.org/10.1109/tps.2021.3113832
https://doi.org/10.1109/tps.2021.3113832
Autor:
Denis Eremin, Dennis Engel, Dennis Krüger, Sebastian Wilczek, Birk Berger, Moritz Oberberg, Christian Wölfel, Andrei Smolyakov, Jan Lunze, Peter Awakowicz, Julian Schulze, Ralf Peter Brinkmann
The electron dynamics and the mechanisms of power absorption in radio-frequency (RF) driven, magnetically enhanced capacitively coupled plasmas at low pressure are investigated. The device in focus is a geometrically asymmetric cylindrical magnetron
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::97b6d888fb29e5f4e890144ee5f1d866
http://arxiv.org/abs/2211.04805
http://arxiv.org/abs/2211.04805
Publikováno v:
Plasma Sources Science and Technology. 32:045011
In partially magnetized technological plasmas like magnetron discharges or Hall-effect thrusters, the interaction of gyrating electrons with the plasma boundary sheath plays an important role. This study shows that the interaction can be described as
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d292d4dce54eae96ba11e435763b8d7e
https://doi.org/10.1088/1361-6595/acc356
https://doi.org/10.1088/1361-6595/acc356
Active plasma resonance spectroscopy (APRS) refers to a class of plasma diagnostic methods that use the ability of plasma to resonate at or near the electron plasma frequency for diagnostic purposes. The planar multipole resonance probe (pMRP) is an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::14bf486236a9dd1a3d7c11dd44c29fcb
http://arxiv.org/abs/2112.14190
http://arxiv.org/abs/2112.14190
Publikováno v:
2021 IEEE International Conference on Plasma Science (ICOPS).
Active Plasma Resonance Spectroscopy (APRS) is an industry compatible plasma diagnostic method, which takes advantage of the ability of the plasma to resonate close to the electron plasma frequency. Planar designs of this concept can be mounted plane
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::07b046fa3b7d947ef71e85d152c1454b
https://doi.org/10.1109/icops36761.2021.9588482
https://doi.org/10.1109/icops36761.2021.9588482
Autor:
Máté Vass, Li Wang, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltán Donkó, Julian Schulze
Publikováno v:
Plasma Sources Science and Technology. 31:115004
Electron power absorption dynamics is investigated in radio-frequency (RF) argon capacitively coupled plasmas (CCPs) at low pressure (4–70 Pa) excited by a dual-frequency waveform with frequencies of 27.12 MHz and 1.937 MHz. Based on the spatio-tem
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::95b8ae4d44354fba50034088ad4841a5
https://doi.org/10.1088/1361-6595/ac9754
https://doi.org/10.1088/1361-6595/ac9754
Publikováno v:
Journal of Applied Physics. 132:139901
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fdd5de102f4fb28d9c6e9d251591be0d
https://doi.org/10.1063/5.0126663
https://doi.org/10.1063/5.0126663
Bounded plasmas are characterized by a rapid but smooth transition from quasi-neutrality in the volume to electron depletion close to the electrodes and chamber walls. The thin non-neutral region, the boundary sheath, comprises only a small fraction
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c8b6c4a5ff206a1fb55b460c14cc5e18
http://arxiv.org/abs/2107.00270
http://arxiv.org/abs/2107.00270
Publikováno v:
Thin Solid Films. 673:94-103
In this paper recent results on monitoring and control of plasma ion assisted deposition (PIAD) processes are presented. An industrial PIAD system equipped with diagnostics for deposition rate and optical thickness was augmented by active plasma reso
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::252eaae20b0e3bf2c729d46e827e0155
https://doi.org/10.1016/j.tsf.2019.01.038
https://doi.org/10.1016/j.tsf.2019.01.038