Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Ralf Kersjes"'
Autor:
Ralf Kersjes, W. Mokwa
Publikováno v:
Sensors and Actuators A: Physical. 47:373-379
A silicon flow sensor for liquid flow based on a SIMOX substrate (separation by implanted oxygen) with a backside etched silicon membrane has been developed and investigated. The flow sensor uses a differential thermal measurement principle, with an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cf1120a90e97f60acc1bc2b0e264a824
https://doi.org/10.1016/0924-4247(94)00924-7
https://doi.org/10.1016/0924-4247(94)00924-7
Publikováno v:
Sensors and Actuators A: Physical. 42:578-581
Silicon membranes are widely used for sensor applications because of their mechanical and electrical properties. Because of the high heat conductance of silicon, they are often required for thermal insulation of sensor devices like gas-sensing elemen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f4655ea97df79615511b151a6b76477f
https://doi.org/10.1016/0924-4247(94)80057-x
https://doi.org/10.1016/0924-4247(94)80057-x
Autor:
W. Mokwa, Ralf Kersjes
Publikováno v:
SPIE Proceedings.
Integration of sensors and electronics on the same substrates becomes more and more important. CMOS circuit design seems to be the most important technique for the monolithic approach. Compared to bipolar circuits power consumption is much lower, com
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ca22d60ecd0d10045de7596012dc2d11
https://doi.org/10.1117/12.250703
https://doi.org/10.1117/12.250703
Conference
Tento výsledek nelze pro nepřihlášené uživatele zobrazit.
K zobrazení výsledku je třeba se přihlásit.
K zobrazení výsledku je třeba se přihlásit.