Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Ralf Borgmann"'
Autor:
Armin Dadgar, Florian Hörich, Ralf Borgmann, Jürgen Bläsing, Gordon Schmidt, Peter Veit, Jürgen Christen, André Strittmatter
Publikováno v:
physica status solidi (a). 220
Autor:
Armin Dadgar, Florian Horich, Ralf Borgmann, Christopher Luttich, Jurgen Blasing, Gordon Schmidt, Peter Veit, Jurgen Christen, Andre Strittmatter
Publikováno v:
2022 Compound Semiconductor Week (CSW).
Autor:
Gordon Schmidt, Jürgen Christen, Armin Dadgar, Frank Bertram, Peter Veit, André Strittmatter, Ralf Borgmann, Florian Hörich, Jürgen Bläsing
Publikováno v:
Journal of Crystal Growth. 571:126250
We present a pulsed reactive magnetron sputter process for high quality AlN on Si (1 1 1) beneficially avoiding any high-temperature growth. Initially, metallic aluminium with a nominal thickness of about one monolayer is deposited at a substrate tem