Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Rakhimov, A. T. R."'
Autor:
Zotovich, A. I., Zyryanov, S. M., Lopaev, D. V., Rezvanov, A. A., Attallah, A. G., Liedke, M. O., Butterling, M., Bogdanova, M. A., Vishnevskiy, A. S., Seregin, D. S., Vorotyntsev, D. A. V., Palov, A. P., Hirschmann, E., Wagner, A., Naumov, S., Vorotilov, K. A., Rakhimova, T. V., Rakhimov, A. T. R., Baklanov, M.
Publikováno v:
Publication date: 2023-01-11 Open accessDOI: 10.14278/rodare.2075Versions: 10.14278/rodare.2076License: CC-BY-4.0
Modification of spin-on-deposited porous PMO (periodic mesoporous organosilica) ultralow-k (ULK) SiCOH films (k = 2.33) containing both methyl terminal and methylene bridging groups by vacuum ultraviolet (VUV) emission from Xe plasma is studied. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______4577::3f190b8e1ba4209058266a65e8140d52
https://www.hzdr.de/publications/Publ-36205-1
https://www.hzdr.de/publications/Publ-36205-1
Autor:
Zotovich, A. I., Zyryanov, S. M., Lopaev, D. V., Rezvanov, A. A., Attallah, A. G., Liedke, M. O., Butterling, M., Bogdanova, M. A., Vishnevskiy, A. S., Seregin, D. S., Vorotyntsev, D. A. V., Palov, A. P., Hirschmann, E., Wagner, A., Naumov, S., Vorotilov, K. A., Rakhimova, T. V., Rakhimov, A. T. R., Baklanov, M.
Publikováno v:
ACS Applied Electronic Materials 4(2022)6, 2760-2776
Modification of spin-on-deposited porous PMO (periodic mesoporous organosilica) ultralow-k (ULK) SiCOH films (k = 2.33) containing both methyl terminal and methylene bridging groups by vacuum ultraviolet (VUV) emission from Xe plasma is studied. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______4577::220133d2c40ef70def61c403aef8816d
https://www.hzdr.de/publications/Publ-35036-1
https://www.hzdr.de/publications/Publ-35036-1