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pro vyhledávání: '"Raji Mali"'
Autor:
Decai Sun, Jen-Tsorng Chang, Chuang-Chia Lin, Janusz Bryzek, Jim Calamita, David W. Burns, Jingkuang Chen, Vladimir L. Rabinovich, Andrew J Zosel, John R Gilbert, Alex T. Tran, Anis Husain, Bill Nowak, Thomas E. Plowman, Charles Hsu, Joel A Kubby, Bruce R. Scharf, Peter M. Gulvin, Shifang Zhou, Tom Pumo, Raji Mali, Li Fan, Troy D. Daiber, Yi Su, Jim Hartman, Steve Delvecchio, Arthur S. Morris, Tom Korsmeyer, Robert M. Lofthus, Michel A. Rosa, Nena Golubovic-Laikopoulos
Publikováno v:
SPIE Proceedings.
A multidisciplinary team of end users and suppliers has collaborated to develop a novel yet broadly enabling process for the design, fabrication and assembly of Micro-Opto- Electro-Mechanical Systems (MOEMS). A key goal is to overcome the shortcoming